# US 12,180,951 B2 · Pump module

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- Number: US 12,180,951 B2
- Document ID: US12180951B2
- Status: Granted
- Kind: B2
- Application number: 17/905,581
- Filed: 2021-02-23
- Published: 2023-04-27
- Granted: 2024-12-31
- Earliest claimed: 2020-03-05
- Assignees: Edwards Vacuum LLC
- Applicants: Edwards Vacuum LLC
- Inventors: Marcus Hans Robert Thierley
- Web page: https://patentgrep.com/patent/US12180951B2

## CPC

- F04B 37/02: for evacuating by absorption or adsorption
- F04B 37/14: to obtain high vacuum
- F04B 39/12: Casings; Cylinders; Cylinder heads; Fluid connections
- F04B 39/121: {Casings}
- F04B 39/14: Provisions for readily assembling or disassembling
- F04B: POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS (machines for liquids, or pumps, of rotary-piston or oscillating-piston type F04C; non-positive-displacement pumps F04D; pumping of fluid by direct contact of another fluid or by using inertia of fluid to be pumped F04F)

## Abstract

Pump module for a vacuum apparatus with a flange which can be connected to a vacuum apparatus in a vacuum-tight manner, at least one ion getter pump and at least one volume getter pump, NEG, where the ion getter pump is directly connected to the flange and the NEG is directly connected to the ion getter pump and where the NEG and the flange are arranged separately from each other.

## Claims

### Claim 1

A pump module comprising:
a flange, configured to be connected to an exterior of a vacuum apparatus in a vacuum-tight manner,
an ion getter pump and
a volume getter pump, NEG,
where the ion getter pump is directly connected to the flange and the NEG is directly connected to the ion getter pump, the NEG and the flange being arranged separately from each other, characterised in that the ion getter pump and the NEG are configured to be inserted into the vacuum apparatus while the ion getter pump is connected to the flange and the NEG is connected to the ion getter pump before the flange is connected to the exterior of the vacuum apparatus.

### Claim 2 (depends on 1)

The pump module in accordance with claim 1, characterised in that a common lead-through for supply lines to the NEG and the ion getter pump is provided through the flange.

### Claim 3 (depends on 1)

The pump module in accordance with claim 1, characterised in that the flange has a first side and an opposite, second side, the NEG and the ion getter pump being arranged on the first side and in particular protruding from the first side.

### Claim 4 (depends on 3)

The pump module in accordance with claim 3, characterised in that in an installed state the first side faces the vacuum apparatus and the second side is in an installed state arranged outside the vacuum apparatus.

### Claim 5 (depends on 1)

The pump module in accordance with claim 1, further comprising a second ion getter pump, the second ion getter pump being directly connected to the flange.

### Claim 6 (depends on 5)

The pump module in accordance with claim 5, further comprising a second NEG directly connected to the second ion getter pump and the second NEG and the flange being arranged separately one from another.

### Claim 7 (depends on 1)

The pump module in accordance with claim 1, characterised in that the ion getter pump is permanently connected to at least one of the flange and the NEG.

### Claim 8 (depends on 1)

The pump module in accordance with claim 1, characterised in that the ion getter pump is detachably connected to at least one of the flange and the NEG.

### Claim 9 (depends on 1)

A vacuum apparatus with a second flange, where the pump module in accordance with claim 1 is connected to the second flange.

### Claim 10 (depends on 9)

The vacuum apparatus in accordance with claim 9, characterised in that the ion getter pump and the NEG both protrude into the vacuum apparatus at the second flange.