# US 12,180,589 B2 · Showerhead for process tool > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,180,589 B2 - Document ID: US12180589B2 - Status: Granted - Kind: B2 - Application number: 17/316,316 - Filed: 2021-05-10 - Published: 2021-12-30 - Granted: 2024-12-31 - Earliest claimed: 2020-06-24 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Anthony Dip - Web page: https://patentgrep.com/patent/US12180589B2 ## CPC - C23C 16/45565: {Shower nozzles} - B05B 1/182: {characterised by their outlet openings or elements; Mounting arrangements therefor} - B05B 1/1823: {Concentric or coaxial groups} - B05B 1/1825: {with three or more dissimilar groups or rows} - B05B 1/185: {characterised by their outlet element; Mounting arrangements therefor} - C23C 16/24: Deposition of silicon only - C23C 16/4412: {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps} - C23C 16/45548: {having arrangements for gas injection at different locations of the reactor for each ALD half-reaction} - C23C 16/45553: {characterized by the use of precursors specially adapted for ALD} - C23C 16/45574: {Nozzles for more than one gas} - C23C 16/4584: {the substrate being rotated} - C23C 16/52: Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} - H10P 14/24: using chemical vapour deposition [CVD] - H10P 14/3411: {Silicon, silicon germanium or germanium} - H10P 74/23: {characterised by multiple measurements, corrections, marking or sorting processes} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract In one example, an apparatus includes a processing chamber; a substrate holder disposed in the processing chamber; and a showerhead disposed over the substrate holder. The showerhead includes a first zone disposed in a central region of the showerhead, the first zone including a first cavity, a plurality of first fluid exit holes aligned to output a fluid from the first cavity towards the substrate holder, a first flow path fluidly coupled to a fluid source, and a plurality of first fluid distribution pathways fluidly coupling the first flow path with the first cavity. ## Claims ### Claim 1 An apparatus comprising: a processing chamber; a substrate holder disposed in the processing chamber; and a showerhead disposed over the substrate holder, the showerhead comprising a first zone disposed in a central region of the showerhead, the first zone comprising a first cavity, a plurality of first fluid exit holes aligned to output a fluid from the first cavity towards the substrate holder, a first flow path fluidly coupled to a first fluid source, and a plurality of first fluid distribution pathways fluidly coupling the first flow path with the first cavity, each of the first fluid distribution pathways comprising a mini cavity for storing the fluid, wherein the mini cavities are arranged in a first section oriented in a first direction and a second section oriented in a second direction, the second direction being orthogonal to the first section, the first section and the second section forming a warped cross shape in a top view. ### Claim 2 (depends on 1) The apparatus of claim 1, further comprising: a second zone disposed in a peripheral region of the showerhead, the second zone comprising a second cavity, a plurality of second fluid exit holes aligned to output the fluid from the second cavity towards the substrate holder, and a second flow path fluidly coupled to a second fluid source and independent of the first flow path. ### Claim 3 (depends on 2) The apparatus of claim 2, further comprising: a plurality of first cavities disposed in the first zone, and a respective plurality of first fluid exit holes aligned to output the fluid from each of the plurality of first cavities towards the substrate holder, a plurality of first flow paths fluidly coupled to the first fluid source, and one of a first plurality of fluid distribution pathways fluidly coupling each of the plurality of first flow paths with each of the plurality of first cavities; and a plurality of second cavities disposed in the second zone, a respective plurality of second fluid exit holes aligned to output the fluid from each of the plurality of second cavities towards the substrate holder, and a plurality of second flow paths fluidly coupled to the second fluid source and independent of the first flow path and the plurality of first flow paths. ### Claim 4 (depends on 2) The apparatus of claim 2, further comprising: a third zone disposed in an intermediate region of the showerhead, the intermediate region disposed between the central region and the peripheral region, the third zone comprising a third cavity, a plurality of third fluid exit holes aligned to output the fluid from the third cavity towards the substrate holder, and a third flow path fluidly coupled to a third fluid source and independent of the first flow path and the second flow path. ### Claim 5 (depends on 2) The apparatus of claim 2, wherein the second fluid source is the same as the first fluid source. ### Claim 6 (depends on 2) The apparatus of claim 2, wherein the second zone further comprises a plurality of second fluid distribution pathways fluidly coupling the second flow path with the second cavity. ### Claim 7 (depends on 1) The apparatus of claim 1, further comprising a skirt disposed around a border of the showerhead and extending towards the substrate holder. ### Claim 8 (depends on 7) The apparatus of claim 7, wherein the skirt extends from the showerhead to a distance between 1 mm and 10 mm above the substrate holder. ### Claim 9 (depends on 7) The apparatus of claim 7, wherein the skirt comprises a vacuum channel disposed around a peripheral region of the showerhead with a plurality of fluid ingress holes aligned to input the fluid away from the substrate holder. ### Claim 10 (depends on 1) The apparatus of claim 1, further comprising a vacuum channel disposed around a peripheral region of the showerhead with a plurality of fluid ingress holes aligned to input the fluid away from the substrate holder. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein the apparatus is an atomic layer deposition apparatus. ### Claim 12 An apparatus comprising: a processing chamber; a substrate holder disposed in the process chamber, the substrate holder being configured to support a plurality of wafers; and a showerhead system disposed over the substrate holder, the showerhead system comprising: a wedge-shaped showerhead disposed around a central region of the processing chamber, the wedge-shaped showerhead comprising: a first cavity in a central zone of the wedge-shaped showerhead, a plurality of first fluid exit holes aligned to output a fluid from the first cavity towards the substrate holder, a plurality of fluid distribution pathways exiting into the first cavity, each of the plurality of fluid distribution pathways comprising a respective mini cavity for storing the fluid, wherein the respective mini cavities are arranged in a first section oriented in a first direction and a second section oriented in a second direction, the second direction being orthogonal to the first section, the first section and the second section forming a warped cross shape in a top view, and a first flow path fluidly coupling a first fluid source with the plurality of fluid distribution pathways. ### Claim 13 (depends on 12) The apparatus of claim 12, further comprising: a peripheral zone disposed in a peripheral region of the central zone, the peripheral zone comprising a second cavity, a plurality of second fluid exit holes aligned to output the fluid from the second cavity towards the substrate holder, and a second flow path fluidly coupled to a second fluid source and independent of the first flow path. ### Claim 14 (depends on 12) The apparatus of claim 12, further comprising a skirt disposed around a border of the wedge-shaped showerhead and extending towards the substrate holder, wherein the skirt comprises a vacuum channel disposed around a peripheral region of the showerhead with a plurality of fluid ingress holes aligned to input the fluid away from the substrate holder. ### Claim 15 (depends on 12) The apparatus of claim 12, further comprising: a vacuum channel disposed around a border of the showerhead with a plurality of fluid ingress holes aligned to input the fluid away from the substrate holder. ### Claim 16 (depends on 12) The apparatus of claim 12, the processing chamber further comprising: dual vacuum ports with a first vacuum port disposed near a first wide corner of the wedge-shaped showerhead and with a second vacuum port disposed near a second wide corner of the wedge-shaped showerhead. ### Claim 17 (depends on 12) The apparatus of claim 12, wherein the apparatus is an atomic layer deposition apparatus. ### Claim 18 An apparatus comprising: a processing chamber; a substrate holder disposed in the processing chamber; and a showerhead disposed over the substrate holder, the showerhead comprising a first flow path fluidly coupled to a first fluid source holding a first fluid, a first plurality of mini cavities, each of the first plurality of mini cavities fluidly coupled to the first fluid source through the first flow path and configured to store the first fluid, the first plurality of mini cavities comprising a first section oriented in a first direction and a second section oriented in a second direction, the second direction being orthogonal to the first section, the first section and the second section forming a warped cross shape in a top view, a first cavity, each of the first plurality of mini cavities comprising one of a first plurality of fluid distribution holes to output the first fluid into the first cavity, and a plurality of first fluid exit holes aligned to output the first fluid from the first cavity towards the substrate holder. ### Claim 19 (depends on 18) The apparatus of claim 18, wherein the first plurality of mini cavities are different in size, wherein one of the first plurality of mini cavities in a central region of the showerhead is smaller than one of the first plurality of mini cavities in a peripheral region of the showerhead. ### Claim 20 (depends on 18) The apparatus of claim 18, wherein the showerhead is a wedge shaped showerhead. ### Claim 21 (depends on 18) The apparatus of claim 18, wherein the showerhead further comprises: a second plurality of mini cavities, each of the second plurality of mini cavities fluidly coupled to the first fluid source through the first flow path and configured to store the first fluid, each of the first plurality of mini cavities being fluidly coupled to the first fluid source through one of the second plurality of mini cavities; and each of the second plurality of mini cavities comprising one of a second plurality of fluid distribution holes to output the first fluid into the respective one of the first plurality of mini cavities to which it is coupled. ### Claim 22 (depends on 18) The apparatus of claim 18, wherein the showerhead further comprises: an upper cavity fluidly coupled to the first fluid source through the first flow path and configured to store the first fluid, each of the first plurality of mini cavities being fluidly coupled to the first fluid source through the upper cavity. ### Claim 23 (depends on 22) The apparatus of claim 22, wherein the showerhead further comprises: a second flow path fluidly coupled to a second fluid source holding a second fluid, a second plurality of mini cavities, each of the second plurality of mini cavities fluidly coupled to the second fluid source through the second flow path and configured to store the second fluid, a second cavity, each of the second plurality of mini cavities comprising one of a second plurality of fluid distribution holes to output the second fluid into the second cavity, and a plurality of second fluid exit holes aligned to output the second fluid from the second cavity towards the substrate holder, the first cavity being positioned over a central region of the substrate holder and the second cavity being positioned over a peripheral region of the substrate holder. ### Claim 24 (depends on 2) The apparatus of claim 2, further comprising a microprocessor configured to independently control respective temperatures in the first zone and the second zone.