# US 12,180,588 B2 · Loading device, arrangement and method for loading a reaction chamber > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,180,588 B2 - Document ID: US12180588B2 - Status: Granted - Kind: B2 - Application number: 18/475,316 - Filed: 2023-09-27 - Published: 2024-01-25 - Granted: 2024-12-31 - Earliest claimed: 2021-03-30 - Assignees: Beneq Oy - Applicants: Beneq Oy - Inventors: Johannes Wesslin; Pekka Soininen; Jonas Andersson - Web page: https://patentgrep.com/patent/US12180588B2 ## CPC - C23C 16/45544: {characterized by the apparatus} - H10P 72/3306: {Horizontal transfer of a single workpiece} - C23C 16/45561: {Gas plumbing upstream of the reaction chamber} - H10P 72/0462: {characterised by the construction of the processing chambers, e.g. modular processing chambers} - H10P 72/3202: {Mechanical details, e.g. rollers or belts} - H10P 72/3302: {Mechanical parts of transfer devices} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A loading device, arrangement, and method for loading a reaction chamber inside a vacuum chamber. The loading device includes a loading platform arranged to support the reaction chamber, the loading platform having a first end, a second end and a first direction, a first loading member provided to the loading platform, and a second loading member provided to the loading platform, the first loading member being arranged independently movable in relation to the loading platform and the second loading member in the first direction, and the second loading member being arranged independently movable in relation to the loading platform and the first loading member in the first direction. ## Claims ### Claim 1 A loading device for loading a reaction chamber inside a vacuum chamber, wherein the loading device comprises: a loading platform configured to support the reaction chamber, the loading platform having a first end, a second end and a first direction extending in a direction between the first end and the second end; a first loading member provided to the loading platform, the first loading member comprising a first loading connector; and a second loading member provided to the loading platform, the second loading member comprising a second loading connector, wherein the first loading member being configured to be independently movable in relation to the loading platform and the second loading member in a second direction transversal to the first direction, and the second loading member being configured to be independently movable in relation to the loading platform and the first loading member in a second direction transversal to the first direction; or the first loading connector of the first loading member being configured to be independently movable in relation to the loading platform and the second loading member in a second direction transversal to the first direction, and the second loading connector of the second loading member being configured to be independently movable in relation to the loading platform and the first loading member in a second direction transversal to the first direction. ### Claim 2 (depends on 1) The loading device according to claim 1, further comprising: a first loading motor connected to the first loading member and configured to move the first loading member in the first direction with a first loading movement; and a second loading motor connected to the second loading member and configured to move the second loading member in the first direction with a second loading movement. ### Claim 3 (depends on 1) The loading device according to claim 1, further comprising: a first connection motor connected to the first loading member and configured to move the first loading member in the second direction with a first connection movement, and a second loading motor connected to the second loading member and configured to move the second loading member in the second direction with a second connection movement; or a first connection motor connected to the first loading connector of the first loading member and arranged to move the first loading connector in the second direction with a second connection movement, and a second loading motor connected to the second loading connector of the second loading member and configured to move the second loading connector in the second direction with a second connection movement. ### Claim 4 (depends on 1) The loading device according to claim 1, wherein the first loading member comprises a first loading arm extending in the first direction and the second loading member comprises a second loading arm extending in the first direction, the first and second loading arms being configured to be spaced apart from each other. ### Claim 5 (depends on 1) The loading device according to claim 1, wherein: the first loading connector comprises a first connector pin, and the second loading connector comprises a second connector pin; or the first loading connector comprises a first connector hole, and the second loading connector comprises a second connector hole. ### Claim 6 (depends on 5) The loading device according to claim 5, wherein: the first and second connector pins extend in the second direction; or the first and the second connector hole extend in the second direction. ### Claim 7 (depends on 1) The loading device according to claim 1, wherein the loading platform comprises: a first transport track extending in the first direction; and a second transport track extending in the first direction and arranged spaced apart from the first transport track. ### Claim 8 (depends on 1) The loading device according to claim 1, further comprising a body, the loading platform being rotatably supported to the body. ### Claim 9 (depends on 1) The loading device according to claim 1, further comprising a vacuum chamber provided with a loading opening. ### Claim 10 (depends on 1) The loading device according to claim 1, wherein the first loading member is configured to be independently movable in relation to the loading platform in a second direction that is disposed at a non-parallel angle to the first direction. ### Claim 11 (depends on 1) The loading device according to claim 1, wherein the first loading connector of the first loading member is configured to be independently movable in relation to the loading platform in a second direction that is disposed at a non-parallel angle to the first direction. ### Claim 12 (depends on 1) The loading device according to claim 1, wherein at least one of the first loading member or the first loading connector of the first loading member is configured to be independently movable in relation to the loading platform in a second direction that is transverse to the first direction. ### Claim 13 A loading device for loading a reaction chamber inside a vacuum chamber, wherein the loading device comprises: a loading platform configured to support the reaction chamber, the loading platform having a first end, a second end and a first direction extending in a direction between the first end and the second end; a body, the loading platform being rotatably supported to the body; a first loading member provided to the loading platform, the first loading member comprising a first loading connector; and a second loading member provided to the loading platform, the second loading member comprising a second loading connector, wherein the first loading member being configured to be independently movable in relation to the loading platform and the second loading member in the first direction, the second loading member being configured to be independently movable in relation to the loading platform and the first loading member in the first direction.