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US 12,180,585 B2Granted
Method for producing gallium precursor and method for producing laminated body using the same
AssigneeShin-Etsu Chemical Co., Ltd.
InventorHiroshi Hashigami
Life of this patent
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Abstract
A method for producing a gallium precursor, including, a step of preparing a solvent comprising an aqueous solution containing an acid and/or an alkali, a step of immersing gallium in the solvent, a step of making the gallium immersed in the solvent fine, and a step of dissolving the fined gallium. This provides a method for producing a gallium precursor with high quality and highly productive.
Claims13
A method for producing a gallium precursor comprising:
- a step of preparing a solvent consisting of water and an alkali, a step of immersing gallium in the solvent, a step of making the gallium immersed in the solvent fine, and a step of dissolving the fine gallium.
Dependencies are inferred from the claim text.