# US 12,180,240 B2 · Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods

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- Number: US 12,180,240 B2
- Document ID: US12180240B2
- Status: Granted
- Kind: B2
- Application number: 17/067,232
- Filed: 2020-10-09
- Published: 2021-01-28
- Granted: 2024-12-31
- Earliest claimed: 2018-04-11
- Assignees: Inpria Corporation
- Applicants: Inpria Corporation
- Inventors: Joseph B. Edson; Thomas J. Lamkin; William Earley; Truman Wambach; Jeremy T. Anderson
- Web page: https://patentgrep.com/patent/US12180240B2

## CPC

- C07F 7/2284: {Compounds with one or more Sn-N linkages}
- C07F 7/2224: {Compounds having one or more tin-oxygen linkages}
- C07F: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM (metal-containing porphyrins C07D487/22)

## Abstract

A pure composition comprises a monoalkyltin trialkoxide compound represented by the chemical formula RSn(OR′)3 or a monoalkyl tin triamide compound represented by the chemical formula RSn(NR′2)3 and no more than 4 mole % dialkyltin compounds relative to the total tin amount, where R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ is a hydrocarbyl group with 1-10 carbon atoms. Methods are described for the formation of the pure compositions. A solid composition comprises a monoalkyl triamido tin compound represented by the chemical formula RSn—(NR′COR″)3, where R is a hydrocarbyl group with 1-31 carbon atoms, and where R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms. The compositions are suitable for the formation of resist compositions suitable for EUV patterning in which the compositions have a high EUV absorption.

## Claims

### Claim 1

A composition comprising:
a monoalkyl triamido tin compound represented by the chemical formula RSn—(NR′COR″)3, wherein R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms.

### Claim 2 (depends on 1)

The composition of claim 1 wherein R′ is a methyl group.

### Claim 3 (depends on 1)

The composition of claim 1 wherein R″ is a methyl group.

### Claim 4 (depends on 1)

The composition of claim 1 wherein R′ is a methyl group and R″ is a methyl group.

### Claim 5 (depends on 4)

The composition of claim 4 wherein R comprises methyl (CH3—), ethyl (CH3CH2—), isopropyl (CH3CH3HC—), tert-butyl ((CH3)3C—), tert-amyl (CH3CH3 (CH3CH2)C—), sec-butyl (CH3 (CH3CH2) HC—), neopentyl (CH3)3CCH2—), cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl.

### Claim 6 (depends on 5)

The composition of claim 5 wherein the composition is crystalline and comprises no more than about 1 mole percent dialkyl tin contaminants.

### Claim 7 (depends on 1)

The composition of claim 1 wherein R comprises methyl (CH3—), ethyl (CH3CH2—), isopropyl (CH3CH3HC—), tert-butyl ((CH3)3C—), tert-amyl (CH3CH3 (CH3CH2)C—), sec-butyl (CH3 (CH3CH2) HC—), neopentyl (CH3)3CCH2—), cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl.

### Claim 8 (depends on 1)

The composition of claim 1 wherein the composition is crystalline and comprises no more than about 1 mole percent dialkyl tin contaminants.

### Claim 9 (depends on 1)

The composition of claim 1 wherein the composition is crystalline and comprises no more than about 0.5 mole percent dialkyl tin contaminants.