# US 12,180,104 B2 · Heat-reflecting member, and method for manufacturing glass member having heat-reflecting layer included therein

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- Number: US 12,180,104 B2
- Document ID: US12180104B2
- Status: Granted
- Kind: B2
- Application number: 17/765,230
- Filed: 2020-09-18
- Published: 2022-11-03
- Granted: 2024-12-31
- Earliest claimed: 2019-09-30
- Assignees: Shin-Etsu Quartz Products Co., Ltd.; Heraeus Quarzglas GmbH & Co. KG
- Applicants: Shin-Etsu Quartz Products Co., Ltd.; Heraeus Quarzglas GmbH & Co. KG
- Inventors: Kazuhiro Yamaguchi; Daiki Fujita; Yoshihiro Harada; Toru Segawa; Tomonori Watanabe
- Web page: https://patentgrep.com/patent/US12180104B2

## CPC

- C03B 19/066: {for the production of quartz or fused silica articles (other processes specially adapted for the production of quartz or fused silica articles C03B20/00)}
- C03B 33/08: by fusing {, i.e. by melting through the glass}
- B23K 26/38: by boring or cutting
- B23K 26/402: involving non-metallic material, e.g. isolators
- B32B 5/145: {Variation across the thickness of the layer}
- B32B 5/16: characterised by features of a layer formed of particles, e.g. chips, powder {or granules (layer formed of natural mineral particles B32B19/00; layer being formed of wood fibres, chips or particles B32B21/02)}
- B32B 17/068: {of particles}
- C03B 33/076: {Laminated glass comprising interlayers}
- C03C 17/25: by deposition from the liquid phase
- C30B 35/002: {Crucibles or containers}
- H10P 72/0436: {mainly by radiation}
- B23K 2103/172: {wherein at least one of the layers is non-metallic}
- B23K 2103/54: {Glass}
- B32B 2307/30: having particular thermal properties
- B32B 2307/72: Density
- C03C 2217/213: SiO2
- C03C 2218/32: After-treatment
- C03B: MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Provided is a heat reflective member, which is prevented from braking even in a high-temperature environment. It generates no dust in use, and can be washed with a chemical liquid. The heat reflective member has a laminated structure in which quartz glass layers are formed on an upper surface and a lower surface of a siliceous sintered powder layer. The heat reflective member includes: an impermeable layer which is formed at a portion of the siliceous sintered powder layer at an end portion of the heat reflective member, which has a thickness at least larger than half of a thickness of the siliceous sintered powder layer, and through which a gas or a liquid is prevented from penetrating; and a buffer layer which is formed between the impermeable layer and the siliceous sintered powder layer, and which changes in density from the impermeable layer toward the sintered powder layer.

## Claims

### Claim 1

A method of manufacturing a glass member with a heat reflective layer, comprising steps of:
producing an intermediate glass laminate having a laminated structure in which a siliceous sintered powder layer is formed between an upper quartz glass layer and a lower quartz glass layer;
wherein the siliceous sintered powder layer is the heat reflective laver; and
cutting out the intermediate glass laminate into a predetermined shape with a laser thereby generating an impermeable layer and a buffer layer simultaneously with the laser cutting at a cut-out end portion of the siliceous sintered powder layer, wherein the impermeable layer is formed at the cut-out end portion by densifying the siliceous sintered powder layer with heat from the laser, wherein the buffer layer is formed adjacent to the impermeable layer, and spaced in a direction away from the cut-out end portion by the impermeable layer, from partially densifying the siliceous sintered powder layer with heat from the laser, and wherein said buffer layer changes in density from the impermeable layer toward the siliceous sintered powder layer.

### Claim 2 (depends on 1)

The method of manufacturing a glass member with a heat reflective layer according to claim 1, comprising:
prior to the cutting out of the intermediate glass laminate, heating and firing the siliceous sintered powder layer with a laser at a power enough to keep the sintered powder layer from cutting or with burner flame from a quartz glass layer side on an outer surface along a site of the intermediate glass laminate to be cut out into a predetermined shape, to thereby form a fired site including an intermediate buffer layer or an intermediate buffer layer and an intermediate impermeable layer.

### Claim 3 (depends on 1)

The method of manufacturing a glass member with a heat reflective layer according to claim 1, wherein the buffer layer has a density gradient that decreases in density from the impermeable layer, which has a first density, toward the siliceous sintered powder layer, which has a second density, wherein the first density is higher than the second density.

### Claim 4

A method of manufacturing a glass member with a heat reflective layer, comprising steps of:
producing an intermediate glass laminate having a laminated structure in which a siliceous sintered powder layer is formed between an upper quartz glass layer and a lower quartz glass layer wherein the siliceous sintered powder layer is the heat reflective layer;
heating and firing the siliceous sintered powder layer with a laser at a power enough to keep the siliceous sintered powder layer from cutting or with burner flame from a quartz glass layer side on an outer surface along a site of the intermediate glass laminate to be cut out into a predetermined shape, to thereby form a fired site including an intermediate buffer layer or an intermediate buffer layer and an intermediate impermeable layer; and
further cutting out a position at which the fired site is formed with a laser so that the intermediate buffer layer and, if applicable, the intermediate impermeable layer are modified, so as to form an end portion structure including a buffer layer and a stronger impermeable layer, wherein said buffer layer changes in density from the impermeable layer toward the siliceous sintered powder layer, wherein the modified impermeable layer is formed at the cut-out end portion by densifying the siliceous sintered powder layer with heat from the laser, wherein the modified buffer layer is formed adjacent to the modified impermeable layer, and spaced in a direction away from the cut-out end portion by the modified impermeable layer by partially densifying the siliceous sintered powder layer.