# US 12,180,063 B2 · Optical device and method for manufacturing same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,180,063 B2 - Document ID: US12180063B2 - Status: Granted - Kind: B2 - Application number: 16/625,701 - Filed: 2018-07-06 - Published: 2021-05-06 - Granted: 2024-12-31 - Earliest claimed: 2017-07-06 - Assignees: Hamamatsu Photonics K.K. - Applicants: Hamamatsu Photonics K.K. - Inventors: Tatsuya Sugimoto; Tomofumi Suzuki; Kyosuke Kotani - Web page: https://patentgrep.com/patent/US12180063B2 ## CPC - B81B 3/0059: {Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056} - G02B 26/001: {based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26)} - B81B 3/00: Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B5/00 takes precedence) - B81B 3/0013: {Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness} - G01B 9/02: Interferometers - G01J 3/45: Interferometric spectrometry - G02B 26/0841: {the reflecting element being moved or deformed by electrostatic means} - H02N 1/008: {Laterally driven motors, e.g. of the comb-drive type} - B81B 2201/04: Optical MEMS - B81B 2203/0118: Cantilevers - B81B 2203/0136: Comb structures - B81B 2203/0154: Torsion bars - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ## Abstract An optical device includes: a base; a movable portion including an optical function portion; an elastic support portion supporting the movable portion so that the movable portion is movable along a first direction; a first comb electrode provided to the base and including a plurality of first comb fingers; and a second comb electrode including a plurality of second comb fingers. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction. ## Claims ### Claim 1 An optical device comprising: a base; a movable portion which includes an optical function portion; an elastic support portion which is connected between the base and the movable portion and supports the movable portion so that the movable portion is movable along a first direction; a first comb electrode which is provided to the base and includes a plurality of first comb fingers; and a second comb electrode which is provided to at least one of the movable portion and the elastic support portion and includes a plurality of second comb fingers arranged alternately with the plurality of first comb fingers, wherein the elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever connected to the torsion bar, the torsion bar being connected between the movable portion and the lever, and the lever being connected between the torsion bar and the base, wherein the second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar, and wherein the first comb finger and the second comb finger which are adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction. ### Claim 2 (depends on 1) The optical device according to claim 1, wherein a pair of the elastic support portions are disposed on both sides of the movable portion in the third direction. ### Claim 3 (depends on 1) The optical device according to claim 1, wherein the direction in which the movable portion has higher external force resistance is the second direction, wherein the elastic support portion further includes an electrode support member provided on the optical function portion side with respect to the torsion bar so as to extend along a plane perpendicular to the first direction, and wherein the second comb electrode is provided along the electrode support member. ### Claim 4 (depends on 1) The optical device according to claim 1, wherein the direction in which the movable portion has higher external force resistance is the third direction, and wherein the second comb electrode is provided along an outer edge of the movable portion. ### Claim 5 An optical device comprising: a base; a movable portion which includes an optical function portion; an elastic support portion which is connected between the base and the movable portion and supports the movable portion so that the movable portion is movable along a first direction; a first comb electrode which is provided to the base and includes a plurality of first comb fingers; and a second comb electrode which is provided to at least one of the movable portion and the elastic support portion and includes a plurality of second comb fingers arranged alternately with the plurality of first comb fingers, wherein the elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever connected to the torsion bar, the torsion bar being connected between the movable portion and the lever, and the lever being connected between the torsion bar and the base, wherein the second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar, and wherein the first comb finger and the second comb finger which are adjacent to each other face each other in a direction in which the movable portion has the highest external force resistance, of directions perpendicular to the first direction. ### Claim 6 (depends on 1) An optical device manufacturing method comprising: a step of creating a model corresponding to the optical device according to claim 1 and measuring a direction in which the movable portion has higher external force resistance, of the second direction and the third direction in the model; and a step of manufacturing the optical device so as to correspond to the model when the first comb finger and the second comb finger which are adjacent to each other face each other in the direction in which the movable portion has higher external force resistance in the model as a result of measuring the direction in which the movable portion has higher external force resistance. ### Claim 7 (depends on 5) An optical device manufacturing method comprising: a step of creating a model corresponding to the optical device according to claim 5 and measuring a direction in which the movable portion has the highest external force resistance, of directions perpendicular to the first direction in the model; and a step of manufacturing the optical device so as to correspond to the model when the first comb finger and the second comb finger which are adjacent to each other face each other in the direction in which the movable portion has the highest external force resistance in the model as a result of measuring the direction in which the movable portion has the highest external force resistance. ### Claim 8 A method of manufacturing an optical device, the optical device comprising: a base; a movable portion which includes an optical function portion; an elastic support portion which is connected between the base and the movable portion and supports the movable portion so that the movable portion is movable along a first direction; a first comb electrode which is provided to the base and includes a plurality of first comb fingers; and a second comb electrode which is provided to at least one of the movable portion and the elastic support portion and includes a plurality of second comb fingers arranged alternately with the plurality of first comb fingers, wherein the elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever connected to the torsion bar, wherein the second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar, and wherein the first comb finger and the second comb finger which are adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction, the method comprising: a step of creating a model corresponding to the optical device and measuring a direction in which the movable portion has higher external force resistance, of the second direction and the third direction in the model; and a step of manufacturing the optical device so as to correspond to the model when the first comb finger and the second comb finger which are adjacent to each other face each other in the direction in which the movable portion has higher external force resistance in the model as a result of measuring the direction in which the movable portion has higher external force resistance. ### Claim 9 A method of manufacturing an optical device, the optical device comprising: a base; a movable portion which includes an optical function portion; an elastic support portion which is connected between the base and the movable portion and supports the movable portion so that the movable portion is movable along a first direction; a first comb electrode which is provided to the base and includes a plurality of first comb fingers; and a second comb electrode which is provided to at least one of the movable portion and the elastic support portion and includes a plurality of second comb fingers arranged alternately with the plurality of first comb fingers, wherein the elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever connected to the torsion bar, wherein the second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar, and wherein the first comb finger and the second comb finger which are adjacent to each other face each other in a direction in which the movable portion has the highest external force resistance, of directions perpendicular to the first direction, the method comprising: a step of creating a model corresponding to the optical device and measuring a direction in which the movable portion has the highest external force resistance, of directions perpendicular to the first direction in the model; and a step of manufacturing the optical device so as to correspond to the model when the first comb finger and the second comb finger which are adjacent to each other face each other in the direction in which the movable portion has the highest external force resistance in the model as a result of measuring the direction in which the movable portion has the highest external force resistance.