Mask, method of manufacturing the same, and method of manufacturing display panel
AssigneeSamsung Display Co., Ltd.
InventorsKabjong Seo, Minsuk Ko, Bogeon Jeon
Life of this patent
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Abstract
A manufacturing method of a mask includes forming a first mask layer, forming a second mask layer on the first mask layer, forming a photoresist pattern layer on the second mask layer, removing a first area of the second mask layer, which is exposed through the photoresist pattern layer, defining an opening through the first mask layer, removing a portion of the photoresist pattern layer to expose a portion of a second area of the second mask layer, and removing the portion of the second area of the second mask layer.
Claims16
A method of manufacturing a mask, the method comprising:
- forming a first mask layer;
- forming a second mask layer on the first mask layer;
- forming a photoresist pattern layer on the second mask layer;
- removing a first area of the second mask layer, which is exposed through the photoresist pattern layer;
- defining an opening through the first mask layer;
- removing a portion of the photoresist pattern layer and exposing a portion of a second area of the second mask layer;
- and
- removing the portion of the second area of the second mask layer
- wherein a maximum area size of the opening is greater than an area size of the first area of the second mask layer in a plan view.
A method of manufacturing a mask, the method comprising:
- forming a first mask layer;
- forming a second mask layer on the first mask layer;
- forming a photoresist pattern layer on the second mask layer;
- removing a first area of the second mask layer, which is exposed through the photoresist pattern layer;
- defining an opening through the first mask layer;
- removing a portion of the photoresist pattern layer and exposing a portion of a second area of the second mask layer;
- and
- removing the portion of the second area of the second mask layer,
- wherein the forming the photoresist pattern layer comprises:
- forming a photoresist layer on the second mask layer;
- disposing an exposure mask comprising a first mask area having a first transmittance, a second mask area having a second transmittance smaller than the first transmittance, and a third mask area having a third transmittance smaller than the second transmittance, which are defined therein, on the photoresist layer;
- and
- patterning the photoresist layer using the exposure mask, and wherein the second mask area is spaced apart from the first mask area with the third mask area interposed therebetween.
A method of manufacturing a display panel, comprising:
- forming a mask through which a through-hole is defined, the forming the mask comprising:
- forming a first mask layer;
- forming a second mask layer on the first mask layer;
- forming a photoresist pattern layer in which a photo opening and a groove surrounding the photo opening are defined on the second mask layer;
- removing a first area of the second mask layer, which overlaps the photo opening;
- etching a portion of the first mask layer and a portion of the photoresist pattern layer;
- and
- etching a second area of the second mask layer exposed through the etched groove;
- preparing a target substrate;
- disposing the mask on the target substrate;
- forming a light emitting pattern in a light emitting area of the target substrate corresponding to the through-hole;
- and
- removing the mask.
Dependencies are inferred from the claim text.