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US 12,176,199 B2Granted
Ionization device and mass spectrometer
AssigneeLeybold Aktiengesellschaft
InventorsYessica Brachthaeuser, Thorsten Benter, Marco Thinius, Michel Aliman
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Abstract
The invention relates to an ionization device with an ionization space formed in a container, an inlet system for supplying a gas to be ionized to the ionization space, an electron source having at least one filament for supply of an electron beam to the ionization space, and an outlet system for letting the ionized gas out of the ionization space. Electron optics having at least two electrodes are disposed between the filament and the ionization space.
Claims11
An ionization device, comprising:
- an ionization space formed in a chamber,
- an inlet system for supplying a gas to be ionized to the ionization space,
- an electron source having at least one filament for supply of an electron beam to the ionization space, and
- an outlet system for letting the ionized gas out of the ionization space,
- characterized in that
- an electron optics comprising at least two electrodes is installed between the filament and the ionization space wherein the electron optics are configured to use one of the at least two electrodes to measure an emission current of the filament.
3 more elements
Dependencies are inferred from the claim text.