Liquid amount measuring method and computer-readable recording medium

A liquid amount measuring method comprising:

• a first step of placing a measurement device on a carrier support of a placement stage, wherein the carrier support is configured to place thereon a carrier configured to accommodate a substrate;
• a second step of transferring a measuring jig in the measurement device from the measurement device to a liquid processing unit after the first step;
• a third step of supplying a processing liquid from a supplier having a nozzle of the liquid processing unit to the measuring jig after the second step to store the processing liquid in the measuring jig;
• a fourth step of, after the third step, transferring the measuring jig from the liquid processing unit to the measurement device, measuring a weight of the measuring jig, in which the processing liquid is stored, in the measurement device, and storing the measured weight in a controller;
• and
• a fifth step of calculating an ejection amount of the processing liquid based on the weight stored in the controller after the fourth step,
• wherein the measuring jig comprises:
• a base member having a size equal to a size of the substrate;
• a lid member provided with a through-hole and placed on the base member;
• and
• a plurality of wall members disposed between the base member and the lid member to join the base member and the lid member,
• wherein, when viewed from a direction in which the base member and the lid member are arranged, the plurality of wall members are arranged to form an annular shape as a whole to surround the through-hole and are separated from each other, and
• wherein the third step includes ejecting the processing liquid from the supplier to the base member through the through-hole.