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US 12,174,542 B2Granted
3D nanoprinter
AssigneeSivananthan Laboratories, Inc.
InventorsJuan Pablo Oviedo Robles, Nigel Browning, Hari Vemuri
Life of this patent
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AssigneeSivananthan Laboratories, Inc.
InventorsJuan Pablo Oviedo Robles, Nigel Browning, Hari Vemuri
Estimating the term…
A 3D nanoprinter electron beam lithography module for a lithography system, such as a scanning electron microscope (SEM) or an environmental SEM (ESEM) with a beam blanker and electron beam lithography attachment, but generally applicable to any electron beam lithography capable system. The module is comprised of an in-situ spin-coating stage that is compatible with a cooling-SEM stage, with a spin-coating motor, a spin-coating sample stub, a liquid waste collector cup, a liquid dispensing arm holding a tube bundle that is connected via tubing to micro-syringe pumps or a pressure driven flow controller or pumps connected to fluid reservoirs, an electron beam scan generator control box, electrical feedthroughs, control electronics, and a computing system responsible for controlling the entire module. The dispensing arm can be controlled by a servo motor.
A lithography system for the deposition or etching of materials comprised of an in-situ spin-coating stage with a spin-coating motor, a spin-coating sample stub for holding a workpiece and driven by the spin-coating motor and connected either to an external power supply or ground, a liquid waste collector cup receiving liquid waste from the workpiece, a liquid dispensing arm having a discharge syringe and connected via tubing to micro-syringe pumps or a pressure driven flow controller, the liquid dispensing arm controlled for movement by a servo motor to position the discharge syringe over the workpiece, an electron or ion beam scan generator control box, and a computing system responsible for controlling the entire system.
A lithography system comprising:
A spin-coating stage for a lithography module system, the spin-coating stage comprising a spin-coating motor, a spin-coating sample stub for holding a workpiece and driven to spin by the spin-coating motor, a liquid waste collector cup receiving liquid waste off the workpiece, and a liquid dispensing arm fluid-connected to a supply of fluid for spin coating, having a discharge over the sample stub, the dispensing arm controlled for pivotal movement by a servo motor to position the discharge over the sample stub.
Dependencies are inferred from the claim text.