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US 12,174,532 B2Granted
Manufacturing a flowcell with a planar waveguide
AssigneeIllumina, Inc.
InventorsDajun Yuan, M. Shane Bowen, Zhong Mei
Life of this patent
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Abstract
Provided in one example is a method of manufacturing a flowcell that includes: forming a core layer, the core layer disposed between a substrate and a nanowell layer, the nanowell layer having nanowells to receive a sample, the core layer having a higher refractive index than the substrate and the nanowell layer; and forming a grating to couple light to the core layer.
Claims13
A flowcell, comprising:
- a substrate having a first side and a second side;
- a nanowell layer having a plurality of nanowells to receive a sample wherein each nanowell of the plurality of nanowells comprises a side wall and a bottom wall;
- a core layer disposed between the substrate and the nanowell layer, the core layer having a first refractive index and the substrate having a second refractive index and the nanowell layer having a third refractive index wherein the first refractive index is higher than the second refractive index and wherein the first refractive index is higher than the third refractive index;
- and
- a grating to couple light to the core layer, wherein the grating is disposed over the substrate and has a first group of ridges adjacent the first side of the substrate and a second group of ridges adjacent the second side of the substrate, wherein the first group of ridges is spaced apart from the second group of ridges by a substantially ridge-free area beneath the bottom walls.
2 more elements
A flowcell, comprising:
- a substrate having a surface;
- a nanowell layer having a plurality of nanowells to receive a sample wherein each nanowell of the plurality of nanowells comprises a side wall and a bottom wall;
- a core layer disposed between the substrate and the nanowell layer, the core layer having a first refractive index and the substrate having a second refractive index and the nanowell layer having a third refractive index wherein the first refractive index is higher than the second refractive index and wherein the first refractive index is higher than the third refractive index;
- and
- a grating to couple light to the core layer, wherein the grating is disposed over the substrate and has a first group of ridges and a second group of ridges, the first group of ridges and the second group of ridges having a longitudinal configuration, wherein the first group of ridges is spaced apart from the second group of ridges by a substantially ridge-free area of the core layer beneath the bottom walls of the plurality of nanowells, the area covering the surface of the substrate.
2 more elements
Dependencies are inferred from the claim text.