Wire bonded common electrical connection in a piezoelectric micro-electro-mechanical system scanning mirror assembly
AssigneeMicrosoft Technology Licensing, LLC
InventorMichael James Nystrom
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AssigneeMicrosoft Technology Licensing, LLC
InventorMichael James Nystrom
Estimating the term…
Electrical connections are created between the actuator frame of a piezoelectric MEMS scanning mirror system and the substrate separate from the structural adhesive creating the mechanical bond between the actuator frame and the substrate. A structural bond (with no conducive properties) is formed between the actuator frame and the substrate. After the bond is fully formed, separate electric connections can be created by one or both of: 1) coating the actuator frame with a coating that enables a surface of the actuator frame to be wire bondable and creating a wire bond between the actuator frame and the substrate; or 2) depositing a trace of conductive material on the outside edge of the mechanical bond between the actuator frame and the substrate and a final protection layer may be applied over the conductive trace to protect the trace from mechanical or environmental damage.
A conductive bridge in a piezoelectric micro-electro-mechanical system (MEMS) scanning mirror system, the system comprising:
A method of providing a conductive bridge in a piezoelectric micro-electro-mechanical system (MEMS) scanning mirror system, the method comprising:
A head mounted display (HMD) device comprising a piezoelectric micro-electro-mechanical system (MEMS) scanning mirror system including a conducting bridge, the system comprising:
Dependencies are inferred from the claim text.