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US 12,173,736 B2Granted
Gas transport system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJheng-Syun Li, Mao-Chou Huang
Life of this patent
Estimating the term…
Abstract
A conduit system for transporting gas from a gas containing chamber for processing a substrate from which semiconductor devices are formed includes a liner with a spiral vent. The conduit system utilizes a curtain of gas to prevent or reduce deposition of material onto an inner surface of the conduit transporting the gas from the gas containing chamber.
Claims20
A gas curtain device comprising:
- a conduit liner, the conduit liner including a spiral vent passing though the conduit liner, wherein the spiral vent has a width W1 measured along length of the conduit liner near a conduit joint and the spiral vent has a width W2 measured along the length of the conduit liner at a location that is further from the conduit joint than a location where W1 is measured, W2 being larger than W1;
- and
- the conduit joint surrounding a portion of the conduit liner, the conduit joint including a plurality of gas inlet ports in fluid communication with the spiral vent of the conduit liner.
A method for transporting a gas, comprising:
- flowing, through an exhaust conduit, an exhaust gas from a gas containing chamber for processing a substrate;
- flowing a purge gas into one of a plurality of gas inlet ports of an exhaust conduit joint;
- flowing the purge gas through a spiral vent in an exhaust conduit liner within the exhaust gas conduit, wherein the exhaust conduit liner includes a conduit finger extending from an exterior of the exhaust conduit liner, the conduit finger contacting the exhaust conduit;
- and
- creating a curtain of purge gas along an internal surface of the exhaust conduit liner.
2 more elements
A conduit system for transporting a gas comprising:
- a conduit in fluid communication with a processing chamber for a semiconductor substrate;
- a conduit liner within the conduit, the conduit liner including a spiral gap, the width of the spiral gap being variable along the length of the conduit liner, the spiral gap including a plurality of adjacent spiral sections, the pitch between adjacent spiral sections of the spiral gap along a length of the conduit liner is variable;
- a conduit joint surrounding a portion of the conduit liner and surrounding a portion of the conduit, the conduit joint including a plurality of gas inlet ports, the gas inlet ports in fluid communication with an interior of the conduit;
- and
- a seal between the conduit and the conduit joint.
2 more elements
Dependencies are inferred from the claim text.