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US 12,172,962 B2Granted
Diaroyl carbazole compound and use thereof as sensitising agent
AssigneeIgm (Anqing) High Technology Development Co., Ltd
InventorsWenchao Zhao, Jiaqi Li, Zhongli Ma, Chenlong Wang, Yonglin Wang
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Abstract
Provided in the present invention is a novel diaroyl carbazole compound, used together with a carbazolyl oxime ester photoinitiator to show a significant synergistic initiation effect in a photoresist composition; the best sensitising effect is shown when the molar ratio of the diaroyl carbazole compound and the carbazolyl oxime ester photoinitiator is 0.1-1.4.
Claims17
A diaroyl carbazole compound,
- wherein said diaroyl carbazole compound is selected from the group consisting of following compounds and any combination thereof:
Dependencies are inferred from the claim text.