Vacuum machining system having a process chamber with a vacuum regulating valve

A vacuum machining system, comprising

• a vacuum chamber which defines an evacuable internal volume for generating a vacuum and for machining a substrate in the internal volume, and
• a vacuum regulating valve for regulating a volume flow or mass flow of a fluid flowing through the vacuum chamber and for interrupting a flow path of the fluid, said valve comprising:
• a first valve seat, which has a first valve opening defining a first opening axis and a first sealing surface extending around the first valve opening, and
• a first valve plate with a first contact surface corresponding to the first sealing surface, and
• a drive unit coupled to the first valve plate configured to move the first valve plate at least from
• an open position, in which the first valve plate and the first valve seat are not in contact with each other, to
• a closed position, in which a sealing contact between the first sealing surface and the first contact surface exists via a sealing element located therebetween and the first valve opening, wherein the closed position provides a gas-tight closure,
• and back again,
• wherein:
• the first valve seat is arranged within the vacuum chamber and divides the vacuum chamber into a main process chamber for machining the substrate and into a secondary process chamber,
• the first sealing surface extends orthogonally to the first opening axis and points in a direction of the secondary process chamber, and
• the first valve plate is movably arranged in the secondary process chamber.