US 12,169,369 B2Granted

Storage for extreme ultraviolet light lithography

AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.

InventorsGuancyun Li, Ching-Jung Chang, Chi-Feng Tung, Hsiang-Yin Shen

Life of this patent

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Abstract

An EUV stocker and an EUV pod device is disclosed. The EUV stocker includes an AI driven dynamic control circuitry, an AI controlled safety interlock, and an independent air return control device. The EUV stocker includes a Mass Flow Control (MFC) that operates in conjunction with one or more valves. The EUV stocker further includes a hydrocarbon detecting assembly, oxygen detecting assembly, pressure detecting assembly, and temperature detecting assembly and more to maintain the required condition within the EUV stocker. The EUV stocker also includes automated transportation devices such as AMHS, OHT, MR, AGV, RGV, or the like to provide a safe EUV mask storage environment for operators.

Claims20

Dependent claims

A stocker system, comprising:

a storage pod configured to store one or more masks, the storage pod contained in a stocker;
a controller operatively coupled to the stocker system, the controller is configured to control at least one of air flow supply to the storage pod, hydrocarbon concentration in the stocker, oxygen concentration in the storage pod, humidity within the storage pod, pressure within the storage pod, or temperature in the storage pod;
an artificial intelligence training circuitry operatively connected to the controller, the artificial intelligence training circuitry configured to recognize data patterns of at least one of the air flow supply to the storage pod, the hydrocarbon concentration in the stocker, the oxygen concentration in the storage pod, the humidity within the storage pod, the pressure within the storage pod or the temperature in the storage pod;
an automated machinery configured to transfer the storage pod into and out of the stocker;
and
a safety interlock assembly operatively coupled to the controller, the safety interlock assembly including:
an operator equipment scanning assembly configured to determine whether equipment for operators entering into the stocker system is functionally operating;
and
an operator identifier scanning assembly configured to scan an identification of operators entering the stocker system.

6 more elements

A method, comprising:

operatively coupling a controller to one or more storage units;
controlling, using a controller, at least one of air flow supply to the storage units, hydrocarbon concentration in the storage units, oxygen concentration in the storage units, humidity within the storage units, pressure within the storage units, or temperature in the storage units;
operatively connecting an artificial intelligence training circuitry to the controller;
recognizing, using the artificial intelligence training circuitry, data patterns of at least one of the air flow supply to the storage units, the hydrocarbon concentration in the storage units, the oxygen concentration in the storage units, the humidity within the storage units, the pressure within the storage units, or the temperature in the storage units;
determining whether equipment for operators entering into the storage units is functionally operating;
and
scanning an identification of operators entering the storage units.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 17/461,703Filed 30 Aug 2021
Published: US 2023/0066297 A12 Mar 2023
Granted: 17 Dec 2024
Term ends: Not estimatedThe source records don’t support an estimate.

Classification13 codes

G03F 7/70866
Environment aspects, e.g. pressure of beam-path gas, temperature: of mask or workpiece
G03F 7/70491
Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring: information management, e.g. software;…
G03F 7/70741
Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask: handling masks outside exposure position, e.g.…
G03F 7/70808
Construction of apparatus, e.g. environment aspects, hygiene aspects or materials: construction details, e.g. housing, load-lock, seals or windows…