Probe tip X-Y location identification using a charged particle beam

A system comprising:

• an imaging system comprising a charged particle beam emitter to emit a charged particle beam;
• a nanoprober comprising an actuator, the nanoprober configured to secure a conductive probe;
• signal measurement circuitry electrically coupled to the conductive probe, the signal measurement circuit to receive signal from the conductive probe;
• and
• at least one tangible, non-transitory computer-readable medium for storing instructions that when executed cause a hardware processor to execute operations, the operations comprising:
• activating a charged particle beam within a first reference frame, the first reference frame associated with the charge particle beam;
• correlating a sample stage reference frame with a sample reference frame;
• causing, by a computerized control system, the charged particle beam and the conductive probe to intersect;
• measuring an electrical response from the intersection of the charged particle beam with the conductive probe;
• determining a location of the conductive probe in a second reference frame based on the electric response from the intersection of the charged particle beam and the conductive probe, the second reference frame associated with the conductive probe;
• and
• correlating the location of the conductive probe in the second reference frame with the first reference frame, the sample stage reference frame, and the sample reference frame.