Detection of surface particles on chamber components with carbon dioxide

A system comprising:

• a memory;
• and
• a processing device coupled to the memory, wherein the processing device is to:
• cause:
• a distribution unit of a particle detection system to initiate a particle collection process to dislodge one or more surface particles from a surface of an article based on a stream comprising at least one of solid CO2 particles or CO2 droplets directed toward the article, and
• the one or more dislodged surface particles to be collected on a surface of a substrate, wherein the substrate has a pre-determined initial state comprising initial surface particles on the surface of the substrate;
• obtain a measurement indicating a particle number concentration of one or more detectable surface particles on the substrate after the particle collection process is completed;
• identify an initial particle number concentration of the initial surface particles of the pre-determined initial state;
• and
• determine a number of particles transported away from the surface of the article based on the obtained measurement and the identified initial particle concentration.

A non-transitory computer readable medium storing instructions that, when executed by a processing device, cause the processing device to:

• cause:
• a distribution unit of a particle detection system to initiate a particle collection process to dislodge one or more surface particles from a surface of an article based on a stream comprising at least one of solid CO2 particles or CO2 droplets directed toward the article, and
• the one or more dislodged surface particles to be collected on a surface of a substrate, wherein the substrate has a pre-determined initial state comprising initial surface particles on the surface of the substrate;
• obtain a measurement indicating a particle number concentration of one or more detectable surface particles on the substrate after the particle collection process is completed;
• identify an initial particle number concentration of the initial surface particles of the pre-determined initial state;
• and
• determine a number of particles transported away from the surface of the article based on the obtained measurement and the identified initial particle concentration.