Detergent composition, substrate cleaning method, and cleaning method for support or substrate
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsMasahito Tanabe, Michihiro Sugo
Life of this patent
Estimating the term…
Abstract
A detergent composition is a detergent composition for removing temporary adhesive containing a silicone compound that is present on a substrate. The detergent composition contains: (A) an organic solvent: 75 to 99 parts by mass; (B) water: 0 to 5 parts by mass; and (C) an ammonium salt: 1 to 20 parts by mass (where (A)+(B)+(C)=100 parts by mass). The organic solvent does not contain an organic solvent having a hydroxy group and contains, in 100 parts by mass of the organic solvent, 50 parts by mass or more of an organic solvent having a heteroatom. The ammonium salt contains at least one kind of a hydroxide ion, a fluoride ion, and a chloride ion.
Claims3
A detergent composition suitable for removing temporary adhesive containing a silicone compound that is present on a substrate, the detergent composition comprising:
- (A) an organic solvent:
- 76 to 95 parts by mass;
- (B) water:
- 1 to 4 parts by mass;
- and
- (C) an ammonium salt:
- 4 to 20 parts by mass
- (where (A)+(B)+(C)=100 parts by mass), wherein
- the organic solvent does not contain an organic solvent having a hydroxy group and contains, in 100 parts by mass of the organic solvent, 50 parts by mass or more of an organic solvent having a heteroatom,
- the organic solvent comprises at least one kind selected from the group consisting of propylene glycol monomethyl ether acetate, dimethyl sulfoxide, butyl acetate, and cyclopentanone, and
- the ammonium salt comprises a tetraalkylammonium salt, wherein the tetraalkylammonium salt comprises a fluoride ion.
Dependencies are inferred from the claim text.