Nanoscale thin film deposition systems
AssigneeBoard of Regents, The University of Texas System
InventorsSidlgata V. Sreenivasan, Parth Pandya, David Choi, Shrawan Singhal, Lawrence Dunn
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Abstract
A method and system for nanoscale precision programmable profiling on substrates. Profiling material is dispensed on a substrate or a superstrate. The superstrate is brought in contact with the substrate. The profiling material is then cured after bringing the superstrate in contact with the substrate. The superstrate is separated from the substrate after curing. An optical metrology of points on the substrate corresponding to the final substrate profile is then performed.
Claims14
A system for nanoscale precision programmable profiling, the system comprising:
- a profiling module, wherein said profiling module has an inkjet for dispensing profiling material;
- a subsystem for handling a roll-based superstrate, wherein said superstrate is used to form a contiguous film of said profiling material between said superstrate and a substrate;
- a subsystem for handling said substrate comprising a vacuum chuck and a vertical tip-tilt stage, wherein an intermittent movement of said vacuum chuck with said vertical tip-tilt stage enables a formation of said contiguous film of said profiling material;
- a subsystem for curing said profiling material;
- and
- a metrology module.
Dependencies are inferred from the claim text.