High voltage pulse generation device, gas laser apparatus, and electronic device manufacturing method

A gas laser apparatus, comprising:

• a laser chamber;
• a pair of discharge electrodes arranged in the laser chamber;
• and
• a high voltage pulse generation device configured to apply a pulse high voltage between the pair of discharge electrodes,
• the high voltage pulse generation device including:
• n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction;
• n primary electric circuits of the transformer connected in parallel to each other, n being a natural number of 2 or more, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2;
• and
• a secondary electric circuit of the transformer including a secondary coil and connected to the pair of discharge electrodes.

An electronic device manufacturing method, comprising:

• generating pulse laser light using a gas laser apparatus;
• emitting the pulse laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture an electronic device,
• the gas laser apparatus, including:
• a laser chamber;
• a pair of discharge electrodes arranged in the laser chamber;
• and
• a high voltage pulse generation device configured to apply a pulse high voltage between the pair of discharge electrodes, and
• the high voltage pulse generation device including:
• n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction;
• n primary electric circuits of the transformer connected in parallel to each other, n being a natural number of 2 or more, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2;
• and
• a secondary electric circuit of the transformer including a secondary coil and connected to the pair of discharge electrodes.