Method and apparatus for Schottky TFE inspection
AssigneesNuFlare Technology, Inc., NuFlare Technology America, Inc.
InventorVictor Katsap
Life of this patent
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Abstract
The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.
Claims13
An image generation method, comprising:
- forming an electron beam using a Schottky thermal field emission (TFE) source, wherein the Schottky TFE source includes a tip and the electron beam is emitted from the tip;
- adjusting the electron beam as the electron beam exited the Schottky TFE source to form an adjusted electron beam by applying a voltage setting to electron optics;
- generating an emission image of the tip of the Schottky TFE source by exposing a scintillator screen to the adjusted electron beam as the adjusted electron beam exited the electron optics;
- adjusting a magnification of the emission image, using a microscope, to form an adjusted emission image on a camera sensor in a camera;
- and
- generating a final image of the adjusted emission image.
An image generation method, comprising:
- forming an electron beam using a Schottky thermal field emission (TFE) source, wherein the Schottky TFE source includes a tip and the electron beam is emitted from the tip;
- adjusting the electron beam to form an adjusted electron beam by applying a voltage setting to electron optics;
- generating an emission image by exposing a scintillator screen to the adjusted electron beam as it exited the electron optics;
- adjusting a magnification of the emission image, using a microscope, to form an adjusted emission image on a camera sensor in a camera;
- generating a final image of the adjusted emission image;
- and
- analyzing the final image to determine whether or not the tip is defective.
Dependencies are inferred from the claim text.