Resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsMasako Sugihara, Mutsuko Higo
Life of this patent
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Abstract
A resist composition includes a novolak resin in which a hydroxy group is substituted with a group represented by formula (3), an acid generator, a quencher, and a solvent: wherein, in formula (3), Ra10 represents a hydrocarbon group having 1 to 20 carbon atoms (e.g., a chain hydrocarbon group such as an alkyl group, an alkenyl group and an alkynyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, groups formed by combining these groups, etc.) and * represents a bond.
Claims15
A resist composition comprising a novolak resin in which a hydroxy group is substituted with a group represented by formula (3), an alkali-soluble resin, an acid generator, a quencher, and a solvent:
- wherein, in formula (3), Ra10 represents a hydrocarbon group having 1 to 20 carbon atoms, and * represents a bond.
Dependencies are inferred from the claim text.