Sensor including a plurality of insulating layers made of different insulating materials
AssigneeTDK Corporation
InventorsKeisuke Takasugi, Kenzo Makino, Hiraku Hirabayashi, Masanori Sakai
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Abstract
A magnetic sensor includes a first insulating layer, a second insulating layer, a third insulating layer, a lower coil element located on an opposite side of the first insulating layer from the second insulating layer, and a second MR element. The second MR element includes a magnetization pinned layer and a free layer. The magnetization pinned layer and the free layer are located on an opposite side of the third insulating layer from the second insulating layer. The first and third insulating layers each contain a first insulating material. The second insulating layer contains a second insulating material.
Claims17
A sensor configured to detect a predetermined physical quantity, the sensor comprising:
- a first insulating layer, a second insulating layer, and a third insulating layer arranged in order along a first direction;
- a metal layer located on an opposite side of the first insulating layer from the second insulating layer;
- and
- a sensor element configured to change in a physical property depending on the predetermined physical quantity, wherein:
- the sensor element includes a functional layer constituting at least a part of the sensor element;
- the functional layer is located on an opposite side of the third insulating layer from the second insulating layer;
- the first and third insulating layers each contain a first insulating material;
- the second insulating layer contains a second insulating material;
- the second insulating layer includes a first portion and a second portion located at a position different from the first portion in a second direction orthogonal to the first direction;
- and
- a maximum dimension of the second portion in the first direction is greater than a maximum dimension of the first portion in the first direction.
A sensor configured to detect a predetermined physical quantity, the sensor comprising:
- a first insulating layer, a second insulating layer, and a third insulating layer arranged in order along a first direction;
- a metal layer located on an opposite side of the first insulating layer from the second insulating layer;
- and
- a sensor element configured to change in a physical property depending on the predetermined physical quantity, wherein:
- the sensor element includes a functional layer constituting at least a part of the sensor element;
- the functional layer is located on an opposite side of the third insulating layer from the second insulating layer;
- the first and third insulating layers each contain a first insulating material;
- the second insulating layer contains a second insulating material;
- and
- a maximum dimension of the second insulating layer in the first direction is greater than a maximum dimension of the first insulating layer in the first direction and that of the third insulating layer in the first direction.
Dependencies are inferred from the claim text.