Method for producing silicon ingot single crystal
AssigneeGlobalWafers Co., Ltd.
InventorsKazuo Nakajima, Masami Nakanishi, Yu Sheng Su, Wen-Ching Hsu
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AssigneeGlobalWafers Co., Ltd.
InventorsKazuo Nakajima, Masami Nakanishi, Yu Sheng Su, Wen-Ching Hsu
Estimating the term…
A method for producing Si ingot single crystal including a Si ingot single crystal growing step, a temperature gradient controlling step and a continuous growing step is provided. In the growing step, the Si ingot single crystal is grown in silicon melt in crucible, and the growing step includes providing a low-temperature region in the Si melt and providing a silicon seed to contact the melt surface of the silicon melt to start crystal growth, and silicon single crystal grows along the melt surface of the silicon melt and toward the inside of the silicon melt. In the temperature gradient controlling step, the under-surface temperature gradient of the silicon single crystal is G1, the above-surface temperature gradient of the silicon single crystal is G2, G1 and G2 satisfy: G2/G1<6. The step of controlling the temperature gradient of silicon single crystal is repeated to obtain the Si ingot single crystal.
A manufacturing method of a silicon ingot single crystal, which manufactures the silicon ingot single crystal by means of a non-contact crucible (NOC) method, comprising:
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