Multi zone spot heating in EPI

A process chamber, comprising:

• a chamber body;
• a substrate support disposed in the chamber body;
• a support disposed outside the chamber body;
• a mounting bracket disposed on the support outside the chamber body;
• and
• a plurality of spot heating modules coupled to the mounting bracket, each spot heating module comprising a movable stage coupled to the mounting bracket, wherein the movable stage includes a slider and a wedge.

A spot heating assembly, comprising:

• a support;
• a mounting bracket disposed on the support;
• a plurality of spot heating modules coupled to the mounting bracket, wherein the mounting bracket comprises:
• an annular portion surrounding a central opening;
• and
• a plurality of openings formed in the mounting bracket, wherein each opening of the plurality of openings is positioned adjacent to a respective spot heating module of the plurality of spot heating modules, wherein each spot heating module of the plurality of spot heating modules is disposed on a respective movable stage.