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US 12,162,763 B2Granted
Method for producing purified chlorosilanes
AssigneeTokuyama Corporation
InventorsJunya Sakai, Shoji Iiyama
Life of this patent
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Abstract
A method for producing purified chlorosilanes includes bringing crude chlorosilanes, such as crude trichlorosilane and crude silicon tetrachloride, which contain a boron compound and/or a phosphorus compound, into contact with chlorine (preferably 1 ppm mole to 3000 ppm mole with respect to 1 mole of crude chlorosilanes) in presence of alkylphenol such as 2-methylphenol, and then distilling the crude chlorosilanes.
Claims10
A method for producing purified chlorosilanes, comprising:
- bringing crude chlorosilanes containing a boron compound and/or a phosphorus compound into contact with chlorine in presence of alkylphenol,
- distilling the crude chlorosilanes, and
- bringing the crude chlorosilanes into contact with oxygen during a period from when the crude chlorosilanes are brought into contact with the chlorine in the presence of the alkylphenol until when subsequent distilling is started,
- wherein an amount of the alkylphenol is 1 ppm mole to 100 ppm mole with respect to 1 mole of the crude chlorosilanes.
1 more element
Dependencies are inferred from the claim text.