Electromechanical microsystem
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsLaurent Mollard, Stéphane Nicolas, Damien Saint-Patrice
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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsLaurent Mollard, Stéphane Nicolas, Damien Saint-Patrice
Estimating the term…
An electromechanical microsystem including two electromechanical transducers, a first deformable diaphragm and a cavity hermetically containing a deformable medium keeping a constant volume under the action of a change in the external pressure. The first diaphragm forms at least one portion of a first wall of the cavity and has a freely deformable area. The free area cooperates with an external member so that its deformation induces, or is induced by, a movement of the external member. The electromechanical transducers are configured so that a first electromechanical transducer forms a portion of the first wall of the cavity, and a second electromechanical transducer forms at least one portion of the wall opposite to the first wall of the cavity.
An electromechanical microsystem comprising:
Dependencies are inferred from the claim text.