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US 12,162,746 B1Granted
MEMS actuators having a physical gap filled with fluid
AssigneeMirrorcle Technologies, Inc.
InventorVeljko Milanovic
Life of this patent
Estimating the term…
Abstract
A MEMS micromirror device comprising, a reflective movable mirror, and a surrounding substrate coplanar to the mirror. A physical gap between the mirror and the surrounding substrate filled with fluid and finger structures extend from a perimeter of the movable mirror into the physical gap.
Claims6
A MEMS micromirror device comprising:
- a reflective movable mirror;
- a surrounding substrate coplanar to the mirror;
- a physical gap filled with fluid between the mirror and the surrounding substrate;
- finger structures extending radially from a perimeter of the movable mirror into the physical gap, wherein there are no finger structures extending radially inward from the surrounding substrate that interdigitate with the finger structures that extend radially from the perimeter of the mirror.
1 more element
Dependencies are inferred from the claim text.