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US 12,162,145 B2Granted
Substrate conveying robot and substrate conveying robot system
AssigneesKawasaki Jukogyo Kabushiki Kaisha, Kawasaki Robotics (USA), Inc.
InventorsHaruhiko Tan, Shota Tominaga, Avish Ashok Bharwani, Simon Jeyapalan
Life of this patent
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Abstract
A substrate conveying robot includes an arm, a substrate holding hand, a sensor board to which a sensor is electrically connected, and a control board on which a controller is mounted, the control board including a universal connector connectable to different types of the sensor boards.
Claims12
A substrate conveying robot comprising:
- an arm;
- a substrate holding hand moved by the arm, movably connected to the arm, and including a blade to support a substrate;
- a sensor board to which a sensor is electrically connected;
- and
- a control board on which a controller is mounted, the control board including a universal connector connectable to different types of the sensor boards, wherein
- the control board includes a hand control board provided inside the substrate holding hand;
- the sensor board includes a substrate detection sensor board to which a substrate detection sensor that detects the substrate is electrically connected and a substrate gripping sensor board to which a substrate gripping sensor that detects that the substrate is gripped by the blade of the substrate holding hand is electrically connected, as hand sensor boards provided inside the substrate holding hand,
- the hand control board includes the universal connector connectable to both the substrate detection sensor board and the substrate gripping sensor board.
5 more elements
A substrate conveying robot system comprising:
- a substrate conveying robot;
- and
- a robot controller configured or programmed to control the substrate conveying robot;
- wherein
- the substrate conveying robot includes:
- an arm;
- a substrate holding hand moved by the arm, movably connected to the arm, and including a blade to support a substrate;
- a sensor board to which a sensor is electrically connected;
- and
- a control board on which a controller is mounted, the control board including a universal connector connectable to different types of the sensor boards;
- wherein
- the control board includes a hand control board provided inside the substrate holding hand;
- the sensor board includes a substrate detection sensor board to which a substrate detection sensor that detects the substrate is electrically connected and a substrate gripping sensor board to which a substrate gripping sensor that detects that the substrate is gripped by the blade of the substrate holding hand is electrically connected, as hand sensor boards provided inside the substrate holding hand,
- the hand control board includes the universal connector connectable to both the substrate detection sensor board and the substrate gripping sensor board.
11 more elements
Dependencies are inferred from the claim text.