Method for controlling a planar drive system and planar drive system

A method for controlling a planar drive system, wherein the planar drive system comprises at least a controller, a stator module and a rotor,

• wherein the stator module comprises a plurality of electrically energizable stator conductors for generating magnetic stator fields for electrically controlling the rotor,
• wherein the rotor comprises a magnet arrangement for generating a magnetic rotor field,
• wherein a magnetic coupling between the rotor and the stator module is achievable via the magnetic stator field and the magnetic rotor field,
• wherein the stator module comprises a sensor module having a plurality of magnetic field sensors for determining a position of the rotor, wherein the magnetic field sensors are arranged in a two-dimensional array at the stator module, and
• wherein each magnetic field sensor is configured to determine, for a spatial region in the two-dimensional array, the magnetic rotor field;
• the method comprising:
• determining a plurality of values of magnetic stator fields for a plurality of different energizing currents and for a plurality of spatial regions in the two-dimensional array of magnetic field sensors in a first magnetic stator field determining step, wherein the first magnetic stator field determining step comprises:
• determining model descriptions of dependencies between energizing currents and magnetic stator fields of the stator conductors in a model determining step;
• generating at least one magnetic stator field by applying corresponding energizing currents to corresponding stator conductors to electrically control the rotor in a magnetic stator field generating step;
• determining a plurality of measured values of a total magnetic field by a plurality of magnetic field sensors for a plurality of spatial regions of the sensor module to determine a position of the rotor in a total magnetic field determining step, wherein the total magnetic field comprises a superposition of the plurality of magnetic stator fields and the magnetic rotor field;
• compensating contributions of the magnetic stator fields to the measured values of the total magnetic field determined by the magnetic field sensors and generating measured values of the magnetic rotor field determined by the respective magnetic field sensors for the respective spatial region in a compensating step, wherein compensating the contributions comprises subtracting the values of the magnetic stator fields determined for the energizing currents from the measured values of the total magnetic field determined by the magnetic field sensors, wherein the compensating step further comprises:
• compensating the contributions of the magnetic stator fields to the measured values of the total magnetic field determined by the magnetic field sensors for arbitrary energizing currents based on the determined model descriptions of the dependencies between the energizing currents and the magnetic stator fields of the stator conductors;
• wherein compensating the contributions in the compensating step is carried out by a correspondingly trained neural network, and
• wherein the correspondingly trained neural network is configured to compensate for each magnetic field sensor the contributions of the magnetic stator fields to the measured values of the total magnetic field determined by the respective magnetic field sensor and to determine measured values of the magnetic rotor field;
• and
• determining a position of the rotor based on the generated measured values of the magnetic rotor field in a position determining step.