Laser system and electronic device manufacturing method

A laser system comprising:

• a wavelength-variable first solid-state laser device configured to output a first pulse laser beam;
• a wavelength conversion system including a first nonlinear crystal configured to wavelength-convert the first pulse laser beam output from the first solid-state laser device and a first rotation stage configured to change a first incident angle of the first pulse laser beam on the first nonlinear crystal;
• an excimer amplifier configured to amplify a pulse laser beam wavelength-converted by the wavelength conversion system;
• and
• a control unit configured to receive, from an external device, data of a target center wavelength of an excimer laser beam output from the excimer amplifier, and control the first incident angle on the first nonlinear crystal such that wavelength conversion efficiency of the first nonlinear crystal has a maximal value at a middle wavelength in a first wavelength range to which the target center wavelength belongs,
• the first wavelength range being separated to include, as a boundary wavelength in the first wavelength range, a wavelength at which a first allowable efficiency minimum value lower than maximum conversion efficiency of the first nonlinear crystal is obtained in accordance with a characteristic of the wavelength conversion efficiency of the first nonlinear crystal changing depending on the first incident angle and the wavelength, and the wavelength conversion efficiency of the first nonlinear crystal being determined to be equal to or higher than the first allowable efficiency minimum value at a specific first incident angle for each first wavelength range.