Shortened load port for factory interface
AssigneeApplied Materials, Inc.
InventorsSrinivas Poshatrahalli Gopalakrishna, Paul B. Reuter, Devendra Channappa Holeyannavar, Douglas B. Baumgarten, Sushant S. Koshti, Arunkumar Ramachandraiah, Narayanan Ramachandran
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