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US 12,159,797 B2Granted
Pyrometry error detection sensor for RTP temperature control system
AssigneeApplied Materials, Inc.
InventorsWolfgang Aderhold, Samuel Howells, Amritha Rammohan, Huy Q. Nguyen
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Abstract
Embodiments disclosed herein include a method for determining a temperature error of a pyrometer. In an embodiment, the method comprises measuring a first signal with a first sensor of the pyrometer and measuring a second signal with a second sensor of the pyrometer. In an embodiment, the method further comprises determining a reflectivity of a reflector plate from the first signal and the second signal, and determining the temperature error using the reflectivity.
Claims10
A processing tool, comprising:
- a chamber;
- a substrate support in the chamber;
- a reflector below the substrate support;
- a heating unit coupled to the chamber, wherein the heating unit is configured to heat a substrate supported by the substrate support;
- and
- a pyrometer passing through the reflector, wherein the pyrometer is configured to measure a temperature of the substrate, the pyrometer for determining a temperature error using a reflectivity, the temperature error for comparing with an estimated temperature error provided by a physics based model, wherein the temperature error is stored for future use when an absolute value of a difference between the temperature error and the estimated temperature error is less than a predetermined threshold, wherein the pyrometer comprises:
- a light pipe;
- focusing optics;
- a first sensor configured to detect light emitted from a relatively small spot on the substrate above the light pipe;
- and
- a second sensor configured to detect light from a wider angle than the first sensor.
8 more elements
A system for processing substrates, comprising:
- a chamber;
- a substrate holder for supporting a substrate;
- a heating element for heating the substrate;
- a reflector plate below the substrate;
- and
- a pyrometer through the reflector and configured to measure a temperature of the substrate, wherein the pyrometer is capable of being used to detect a temperature error resulting from deposition on the reflector plate, wherein a method to detect the temperature error comprises:
- measuring a first signal with a first sensor of the pyrometer;
- measuring a second signal with a second sensor of the pyrometer;
- determining a reflectivity of the reflector plate from the first signal and the second signal;
- determining the temperature error using the reflectivity;
- and
- comparing the temperature error with an estimated temperature error provided by a physics based model, wherein the temperature error is stored for future use when an absolute value of a difference between the temperature error and the estimated temperature error is less than a predetermined threshold.
9 more elements
Dependencies are inferred from the claim text.