Process recipe creation and matching using feature models

A system comprising:

• a memory and
• a processing device, operatively coupled to the memory, to perform operations comprising:
• determining whether a first process recipe comprising a set of Pareto efficient parameters is to be selected from a set of process recipes for processing a component, wherein the set of Pareto efficient parameters fail to satisfy each target property of a set of target properties for processing the component;
• in response to determining that the first process recipe is not to be selected from a set of process recipes for processing the component, selecting, from the set of process recipes, a second process recipe comprising a set of parameters satisfying each target property of the set of target properties;
• and
• causing the component to be processed by a process tool using the second process recipe.

A non-transitory machine-readable storage medium storing instructions which, when executed by a processing device, cause the processing device to perform operations comprising:

• determining whether a first process recipe comprising a set of Pareto efficient parameters is to be selected from a set of process recipes for processing a component, wherein the set of Pareto efficient parameters fail to satisfy each target property of a set of target properties for processing the component;
• in response to determining that the first process recipe is not to be selected from a set of process recipes for processing the component, selecting, from the set of process recipes, a second process recipe comprising a set of parameters satisfying each target property of the set of target properties;
• and
• causing the component to be processed by a process tool using the second process recipe.