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US 12,158,448 B2Granted
Radiation source device
AssigneeInfineon Technologies AG
InventorsDerek Debie, Klaus Elian, Ludwig Heitzer, David Tumpold, Jens Pohl, Cyrus Ghahremani, Thorsten Meyer, Christian Geissler, Andreas Allmeier
Life of this patent
Estimating the term…
Abstract
A radiation source device includes at least one membrane layer, a radiation source structure to emit electromagnetic or infrared radiation, a substrate and a spacer structure, wherein the substrate and the at least one membrane form a chamber, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, and wherein the radiation source structure is arranged between the at least one membrane layer and the substrate.
Claims20
A gas sensor, comprising:
- a radiation source device comprising:
- a first membrane layer;
- a radiation source structure configured to emit electromagnetic or infrared radiation;
- a spacer structure attached to the radiation source structure;
- and
- a second membrane layer;
- wherein the first membrane layer and the second membrane layer are at least partially permeable for electromagnetic radiation,
- wherein the first membrane layer, the spacer structure, and the second membrane layer form a chamber enclosing the radiation source structure, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber,
- wherein the radiation source structure is arranged between the first membrane layer and the second membrane layer, and
- wherein the radiation source structure comprises a perforation forming a ventilation hole between a first volume portion of the chamber enclosed between the radiation source structure and the first membrane layer and a second volume portion of the chamber enclosed between the radiation source structure and the second membrane layer;
- a measurement volume having a target gas and providing an optical interaction for the electromagnetic or infrared radiation emitted by the radiation source device;
- and
- an acoustic transducer or a direct thermal detector for providing a detector output signal based on the optical interaction with the target gas in the measurement volume.
10 more elements
A gas sensor, comprising:
- a radiation source device comprising:
- a first membrane layer;
- a radiation source structure configured to emit electromagnetic or infrared radiation;
- a spacer structure;
- and
- a second membrane layer,
- wherein the first membrane layer and the second membrane layer are at least partially permeable for electromagnetic radiation,
- wherein the first membrane layer, the spacer structure, and the second membrane layer form a chamber enclosing the radiation source structure, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber,
- wherein the radiation source structure is arranged between the first membrane layer and the second membrane layer, and
- wherein the radiation source structure comprises a perforation forming a ventilation hole between a first volume portion of the chamber enclosed between the radiation source structure and the first membrane layer and a second volume portion of the chamber enclosed between the radiation source structure and the second membrane layer;
- a measurement volume having a target gas and providing an optical interaction for the electromagnetic or infrared radiation emitted by the radiation source device;
- and
- an acoustic transducer or a direct thermal detector for providing a detector output signal based on the optical interaction with the target gas in the measurement volume.
10 more elements
A method of operating a gas sensor, comprising:
- a radiation source device comprising:
- a first membrane layer, a radiation source structure configured to emit electromagnetic or infrared radiation, a spacer structure, and a second membrane layer, wherein the first membrane layer and the second membrane layer are at least partially permeable for electromagnetic radiation, wherein the first membrane layer, the spacer structure, and the second membrane layer form a chamber enclosing the radiation source structure, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, wherein the radiation source structure is arranged between the first membrane layer and the second membrane layer, and wherein the radiation source structure comprises a perforation forming a ventilation hole between a first volume portion of the chamber enclosed between the radiation source structure and the first membrane layer and a second volume portion of the chamber enclosed between the radiation source structure and the second membrane layer;
- a measurement volume having a target gas and providing an optical interaction for the electromagnetic or infrared radiation emitted by the radiation source device;
- and an acoustic transducer or a direct thermal detector for providing a detector output signal based on the optical interaction with the target gas in the measurement volume, the method comprising:
- emitting, by the radiation source structure, the electromagnetic or infrared radiation.
2 more elements
Dependencies are inferred from the claim text.