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US 12,158,384 B2Granted
Pressure sensor
AssigneeMurata Manufacturing Co., Ltd.
InventorRyohei Hamazaki
Life of this patent
Estimating the term…
Abstract
A pressure sensor includes a base, a sensor facing the base in a height direction with a space between the sensor and the base to sense pressure applied to a sensing surface on a side opposite to the base in the height direction, a surrounding portion raised in the height direction from the base and surrounding the sensor with a groove extending around the sensor, between the surrounding portion and the sensor, a coupling portion coupling the sensor with the surrounding portion, and a beam in the groove to apply a resistance to the surrounding portion moving toward the sensor.
Claims17
A pressure sensor comprising:
- a base;
- a sensor facing the base in a height direction with a space between the sensor and the base to sense pressure applied to a sensing surface on a side opposite to the base in the height direction;
- a surrounding portion raised in the height direction from the base and surrounding the sensor with a groove extending around the sensor between the surrounding portion and the sensor;
- a coupling portion coupling the sensor with the surrounding portion;
- and
- a damper portion in the groove to apply a resistance to the surrounding portion moving toward the sensor.
3 more elements
Dependencies are inferred from the claim text.