US 12,158,340 B2 · Device and method for measuring laser displacement

Abstract

Disclosed are a device and a method for measuring laser displacement. The device comprises an interferometric measurement module, a laser light source module, a signal modulation module, a control processing module and an optical vernier demodulation module. The control processing module controls the signal modulation module to apply a light source modulation signal to the laser light source module, so that the laser light source module provides two laser beams with fixed frequency difference to the interferometric measurement module. The control processing module controls the interferometric measurement module to perform interferometric measurement. During measurement, lasers respectively interfere in two Fabry-Perot cavities in the interferometric measurement module, and are detected by two photodetectors to form main and secondary measurement interference signals. The optical vernier demodulation module demodulates the main and secondary measurement interference signals obtained by the interferometric measurement module.

Claims9

Dependent claims

A device for measuring laser displacement, comprising

a controller, for controlling a modulator to apply a light source modulation signal to a laser light source,
the laser light source, for providing two laser beams with fixed frequency difference to an interferometric measurer;
the controller, further for controlling the interferometric measurer to perform interferometric measurement;
wherein during measurement, lasers interfere in two Fabry-Perot cavities in the interferometric measurer, and are detected by two photodetectors to form a main measurement interference signal and a secondary measurement interference signal;
an optical vernier demodulator, for demodulating the main measurement interference signal and the secondary measurement interference signal obtained by the interferometric measurer, and
the controller, further for calculating demodulation results to obtain a measured displacement.

3 more elements

A method for measuring laser displacement, comprising:

S11, modulating a laser light source by a modulator, so that two laser beams with wavelengths of λ, λ0 respectively, are emitted by the laser light source, and injected into an interferometric measurer for interferometric measurement;
S12, controlling the interferometric measurer to perform interferometric measurement by a controller;
injecting lasers with wavelengths of λ, λ0 into a main Fabry-Perot interferometer composed of a first precision displacement stage, a first resonant plane mirror, a first pyramid reflector and a second precision displacement stage, and a secondary Fabry-Perot interferometer composed of a second resonant plane mirror, the first pyramid reflector and the second precision displacement stage, respectively, for interference to form a main measurement interference beam and a secondary measurement interference beam, then receiving the main measurement interference beam and the secondary measurement interference beam by a first photodetector and a second photodetector respectively;
S13, controlling the second precision displacement stage to move by the controller, so that the first pyramid reflector scans back and forth;
S14, detecting the main measurement interference beam by the first photodetector to obtain a main measurement interference signal when a displacement of the first resonant plane mirror is ΔL;
detecting the secondary measurement interference beam by the second photodetector to obtain a secondary measurement interference signal;
demodulating the main measurement interference signal and the secondary measurement interference signal by an optical vernier demodulator through an optical vernier principle, demodulating out the number M of small displacements, and calculating small displacements 1 by the controller:
l
=
M
×
λ
-
λ
0
4
;
S15, demodulating out the number N of large displacements by the optical vernier demodulator when a displacement of the second resonant plane mirror exceeds a Fabry-Perot interference peak, in other words, the second resonant plane mirror moves more than one large displacement, and calculating large displacements L by the controller:
L
=
N
×
λ
4
;
and
S16, calculating the large displacements and the small displacements by the controller and then calculating a measured displacement ΔL according to the following formula,
ΔL=L+l,
so far, obtaining a motion displacement of the first resonant plane mirror.

26 more elements

A method for measuring laser displacement, comprising:

S21, modulating a laser light source by a signal modulator, so that two laser beams with wavelengths of λ, λ0 respectively, are emitted by the laser light source, and are injected into an interferometric measurer for interferometric measurement;
S22, controlling the interferometric measurer to perform interferometric measurement by a controller;
dividing a laser with wavelength of λ into a first sub-main laser beam and a second sub-main laser beam by a beam splitting plate, and injecting the first sub-main laser beam, the second sub-main laser beam and the laser with wavelength of λ0 respectively to a first main Fabry-Perot interferometer composed of a first precision displacement stage, a third resonant plane mirror, a first pyramid reflector and a second precision displacement stage, a second main Fabry-Perot interferometer composed of the first precision displacement stage, a third resonant plane mirror and a second pyramid reflector and a secondary Fabry-Perot interferometer composed of the second resonant plane mirror, the first pyramid reflector and the second precision displacement stage for interference to form a first sub-main measurement interference beam, a second sub-main measurement interference beam and a secondary measurement interference beam, then receiving the first sub-main measurement interference beam, the second sub-main measurement interference beam and the secondary measurement interference beam by a first photodetector, a second photodetector and a third photodetector respectively;
S23, controlling the second precision displacement stage to move by the controller, so that the first pyramid reflector scans back and forth;
S24, detecting the first sub-main measurement interference beam by the first photodetector to obtain a first sub-main measurement interference signal when a displacement of the third resonant plane mirror is ΔL;
detecting the secondary measurement interference beam by the second photodetector to obtain a secondary measurement interference signal;
detecting the second sub-main measurement interference beam by the third photodetector to obtain a second sub-main measurement interference signal;
S25, demodulating the first sub-main measurement interference signal and the secondary measurement interference signal by an optical vernier demodulator according to an optical vernier principle, demodulating out the number M of small displacements, and calculating small displacements 1 by the controller:
l
=
M
×
λ
-
λ
0
4
;
S26, demodulating the second sub-main measurement interference signal to obtain the number of large displacements by the optical vernier demodulator, and calculating by the controller to obtain large displacements L:
L
=
N
×
λ
4
;
and
S27, calculating the large displacements and the small displacements by the controller, and then calculating a measured displacement ΔL according to the following formula,
ΔL=L+l+l0
a motion displacement of the third resonant plane mirror is obtained, where l0 is a difference of light intensity peak displacement between the first sub-main measurement interference signal and the second sub-main measurement interference signal when a mechanical setting is zero.

27 more elements

Dependencies are inferred from the claim text.

Device and method for measuring laser displacement

Life of this patent

Device and method for measuring laser displacement

Life of this patent

Abstract

Claims9