Abatement

Abstract

An abatement method is disclosed. The method comprises: supplying a combustion chamber of an abatement apparatus with an effluent stream containing a perfluoro compound, together with combustion reagents and a diluent; heating a combustion zone of said combustion chamber by reacting said combustion reagents to perform abatement of said perfluoro compound to stable by-products, said diluent being selected to remain inert during said abatement. In this way, the perfluoro or other compound is abated in the combustion chamber during the combustion of the combustion reagents, but without creating undesirable compounds such as, for example, NOx or other compounds.

Dependencies are inferred from the claim text.