Estimation device, vacuum valve, and vacuum pump
AssigneeShimadzu Corporation
InventorJunichiro Kozaki
Life of this patent
Estimating the term…
Abstract
An estimation device for estimating a process gas condition in a system for pumping gas from a vacuum chamber into which the gas is injected to perform a treatment process by a vacuum pump attached to the vacuum chamber through a vacuum valve, comprises: a computer having a processor and a memory, wherein the computer estimates a first process gas condition including an injected gas type and a gas flow rate based on correlation data between a valve body opening degree of the vacuum valve and an effective exhaust speed of the system regarding a predetermined gas type and a chamber pressure of the vacuum chamber.
Claims16
An estimation device for estimating a process gas condition in a system for pumping gas from a vacuum chamber into which the gas is injected to perform a treatment process by a vacuum pump attached to the vacuum chamber through a vacuum valve, comprising:
- a computer having a processor and a memory,
- wherein the computer estimates a first process gas condition including an injected gas type and a gas flow rate based on correlation data between a valve body opening degree of the vacuum valve and an effective exhaust speed of the system regarding a predetermined gas type and a chamber pressure of the vacuum chamber.
Dependencies are inferred from the claim text.