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US 12,157,702 B2Granted
Ceramic substrate and electrostatic chuck
AssigneeShinko Electric Industries Co., Ltd.
InventorTomotake Minemura
Life of this patent
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Abstract
A ceramic substrate includes a substrate main body, and a conductor layer provided inside of the substrate main body. The substrate main body includes an insulator layer that is ceramics composed of aluminum oxide, and a composite oxide layer of aluminum and silicon, the composite oxide layer being formed between the insulator layer and the conductor layer.
Claims19
A ceramic substrate comprising:
- a substrate main body;
- and
- a conductor layer provided inside of the substrate main body,
- wherein the substrate main body comprises:
- an insulator layer that is ceramics composed of aluminum oxide, the conductor layer being provided inside of the insulator layer, and
- a composite oxide layer of aluminum and silicon, the composite oxide layer covering the conductor layer so as to be formed between the insulator layer and the conductor layer.
3 more elements
An electrostatic chuck comprising:
- a substrate main body;
- and
- an electrostatic electrode provided inside of the substrate main body,
- wherein the substrate main body comprises:
- an insulator layer that is ceramics composed of aluminum oxide, the electrostatic electrode being provided inside of the insulator layer, and
- a composite oxide layer of aluminum and silicon, the composite oxide layer covering the electrostatic electrode so as to be formed between the insulator layer and the electrostatic electrode.
3 more elements
Dependencies are inferred from the claim text.