Venting device, manufacturing method of venting device, venting method and device

A venting device, comprising:

• an anchor structure;
• and
• a membrane anchored on the anchor structure and configured to form a vent, wherein the membrane comprises a first flap and a second flap;
• wherein the membrane partitions a space into a first volume and a second volume, and the first volume and the second volume are connected via the vent when the vent is formed;
• wherein a slit is formed on the membrane and the vent is formed because of the slit;
• wherein a segment of the slit zigzags on the membrane;
• wherein the first flap is actuated to move toward a first direction and the second flap is actuated to move toward a second direction opposite to the first direction, so as to form the vent.

A manufacturing method of a venting device, comprising:

• providing a wafer comprising a first layer and a second layer, wherein the first layer comprises a membrane;
• and
• patterning the first layer of the wafer to form a plurality of slits, such that the membrane comprises a first flap, a second flap and a third flap separated from each other by the slits;
• wherein the membrane is configured to be controlled to form a plurality vents because of the plurality of slits;
• wherein the slits comprises a first slit and a second slit, and the vents comprise a first vent and a second vent;
• wherein the first slit is formed between the first flap and the second flap, and the second slit is formed between the first flap and the third flap;
• wherein the first flap is actuated to move toward a first direction and the second flap is actuated to move toward a second direction opposite to the first direction, so as to form the first vent;
• wherein the first flap is actuated to move toward the first direction and the third flap is actuated to move toward the second direction opposite to the first direction, so as to form the second vent.

A manufacturing method of a venting device, comprising:

• providing a wafer comprising a first layer and a second layer, wherein the first layer comprises a membrane;
• and
• patterning the first layer of the wafer to form a zigzagging slit, wherein the zigzagging slit zigzags on the membrane and extends toward a direction, and the membrane comprises a first flap and a second flap separated from each other by the zigzagging slit;
• wherein the membrane is configured to be controlled to form a vent, and the vent is formed because of the zigzagging slit;
• wherein the first flap is actuated to move toward a first direction and the second flap is actuated to move toward a second direction opposite to the first direction, so as to form the vent.