Process apparatus and process method

A process apparatus that performs processing on a byproduct generated in a reaction of a raw material including silicon and a halogen element or in a reaction between a raw material including silicon and a raw material including a halogen element, the apparatus comprising:

• a process liquid tank that stores process liquid including a basic aqueous solution;
• a processing tank into which a process target member including the byproduct is introduced;
• a supplier that supplies the process liquid from the process liquid tank to the processing tank and performs processing on the byproduct in the processing tank with the supplied process liquid;
• an exhauster that exhausts a gas generated by reaction between the process liquid and the byproduct from the processing tank;
• and
• a jig that maintains the process target member in a predetermined posture in the process liquid in the processing tank, and in a state where an opening of a pipe of the process target member faces a side where a liquid surface of the process liquid is located.