Abnormality detection apparatus, abnormality detection method, storage medium, shutter apparatus, exposure apparatus, and method for manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorShunsuke Miyazaki
Life of this patent
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Abstract
An abnormality detection apparatus for detecting an abnormal operation in a shutter apparatus configured to block light includes one or more memories, and one or more processors that cooperate with the one or more memories to detect the abnormal operation using an abnormality detection model that outputs determination data for detecting the abnormal operation in a case where information about measurement data on the shutter apparatus is input to the abnormality detection model.
Claims17
An abnormality detection apparatus for detecting an abnormality in a shutter apparatus configured to block light, the abnormality detection apparatus comprising:
- one or more memories;
- and
- one or more processors that cooperate with the one or more memories to:
- detect the abnormality using an abnormality detection model that outputs determination data for detecting the abnormality by inputting information to the abnormality detection model,
- wherein the information includes a feature value calculated from time-series data of a physical quantity regarding the shutter apparatus, and
- wherein the feature value includes a center of gravity that is calculated from a waveform of the time-series data.
An abnormality detection apparatus for detecting an abnormality in a shutter apparatus configured to block light, the abnormality detection apparatus comprising:
- one or more memories;
- and
- one or more processors that cooperate with the one or more memories to:
- detect the abnormality using an abnormality detection model that outputs determination data for detecting the abnormality by inputting information to the abnormality detection model, wherein the information includes a feature value calculated from time-series data of a physical quantity regarding the shutter apparatus;
- and
- determine whether the detected abnormality is a periodic abnormality based on the time-series data of the physical quantity regarding the shutter apparatus and is divided based on a timing at which the shutter apparatus drives a shutter.
An abnormality detection method for detecting an abnormality in a shutter apparatus configured to block light, the method comprising:
- detecting the abnormality using an abnormality detection model that outputs determination data for detecting the abnormality by inputting information to the abnormality detection model,
- wherein the information includes a feature value calculated from time-series data of a physical quantity regarding the shutter apparatus, and
- wherein the feature value includes a center of gravity that is calculated from a waveform of the time-series data.
A non-transitory computer-readable storage medium that stores a program for causing a computer to execute an abnormality detection method for detecting an abnormality in a shutter apparatus configured to block light, the abnormality detection method comprising:
- detecting the abnormality using an abnormality detection model that outputs determination data for detecting the abnormality by inputting information to the abnormality detection model,
- wherein the information includes a feature value calculated from time-series data of a physical quantity regarding the shutter apparatus, and
- wherein the feature value includes a center of gravity that is calculated from a waveform of the time-series data.
A shutter apparatus for blocking light, the shutter apparatus comprising:
- one or more memories;
- and
- one or more processors that cooperate with the one or more memories to:
- detect an abnormality in the shutter apparatus using an abnormality detection model that outputs determination data for detecting the abnormality by inputting information to the abnormality detection model,
- wherein the information includes a feature value calculated from time-series data of a physical quantity regarding the shutter apparatus, and
- wherein the feature value includes a center of gravity that is calculated from a waveform of the time-series data.
An exposure apparatus for exposing a substrate by illuminating the substrate with light, the exposure apparatus comprising:
- a shutter apparatus configured to block the light;
- and
- an abnormality detection apparatus configured to detect an abnormality in the shutter apparatus,
- wherein the abnormality detection apparatus includes:
- one or more memories;
- and
- one or more processors that cooperate with the one or more memories to:
- detect the abnormality using an abnormality detection model that outputs determination data for detecting the abnormality by inputting information to the abnormality detection model,
- wherein the information includes a feature value calculated from time-series data of a physical quantity regarding the shutter apparatus, and
- wherein the feature value includes a center of gravity that is calculated from a waveform of the time-series data.
A molding apparatus for molding a composition on a substrate by bringing a mold into contact with the composition and illuminating the composition with light, the molding apparatus comprising:
- a shutter apparatus configured to block the light;
- and
- an abnormality detection apparatus configured to detect an abnormality in the shutter apparatus,
- wherein the abnormality detection apparatus includes
- one or more memories;
- and
- one or more processors that cooperate with the one or more memories to:
- detect the abnormality using an abnormality detection model that outputs determination data for detecting the abnormality by inputting information to the abnormality detection model,
- wherein the information includes a feature value calculated from time-series data of a physical quantity regarding the shutter apparatus, and
- wherein the feature value includes a center of gravity that is calculated from a waveform of the time-series data.
Dependencies are inferred from the claim text.