Resonator and resonance device for vibrating in a contour vibration mode
AssigneeMurata Manufacturing Co., Ltd.
InventorsToshio Nishimura, Ville Kaajakari
Life of this patent
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Abstract
A resonator is provided that includes a vibration member that includes a substrate, a metal layer formed along one of main surfaces of the substrate, and a piezoelectric thin film disposed between the substrate and the metal layer. The vibration member vibrates such that a main vibration is a contour vibration. Moreover, a frame surrounds at least a portion of the vibration member, and a support unit connects the vibration member to the frame. The vibration member includes depressed portions on or above the one of main surfaces where the piezoelectric thin film is removed.
Claims20
A resonator comprising:
- a vibration member that includes a substrate, a first electrode disposed on a first main surface of the substrate, and a piezoelectric layer disposed between the substrate and the first electrode, with the vibration member configured to vibrate with a main vibration being a contour vibration;
- a frame that surrounds at least a portion of the vibration member;
- and
- a support member that connects the vibration member to the frame,
- wherein the vibration member includes a depressed portion on or above the first main surface of the substrate where the piezoelectric layer is removed.
A resonator comprising:
- a vibration member that includes a substrate, a first electrode disposed above the substrate, and a piezoelectric layer disposed between the substrate and the first electrode, with the vibration member having a main vibration mode being a contour vibration;
- a frame that surrounds at least a portion of the vibration member;
- and
- a support member that connects the vibration member to the frame,
- wherein the vibration member includes at least one depression extending through the piezoelectric layer.
Dependencies are inferred from the claim text.