VCSEL with double oxide apertures
AssigneeII-Vi Delaware, Inc.
InventorsHanxing Shi, Richa Dubey, Deepa Gazula, Chris Kocot, Charles B. Roxlo
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Abstract
In one example, a vertical cavity surface emitting laser (VCSEL) may include an active region to produce light at a wavelength, an emission surface to emit the light at the wavelength, a first oxide region spaced apart from the active region by a distance of at least a half-wavelength of the wavelength, a first oxide aperture in the first oxide region, a second oxide region between the first oxide region and the second oxide region, and a second oxide aperture in the second oxide region. The emitted light may have a divergence angle that is based on the respective positions and thicknesses of the first oxide region and the second oxide region.
Claims21
A vertical cavity surface emitting laser (VCSEL) comprising:
- an active region configured to produce light at a wavelength;
- a first oxide region having a first thickness and spaced apart from the active region by a distance of at least one-half of the wavelength, wherein the first oxide region is located at a second node of a standing wave counted as extending away from the active region;
- a top mirror formed over the first oxide region, wherein the first oxide region being between the active region and the top mirror;
- and
- a second oxide region having a second thickness and disposed adjacent to the first oxide region, wherein the first oxide region is between the active region and the second oxide region,
- wherein the light has a divergence angle based upon the first thickness of the first oxide region and the second thickness of the second oxide region.
Dependencies are inferred from the claim text.