Ultraviolet irradiation device using excimer lamps
AssigneeUshio Denki Kabushiki Kaisha
InventorHideaki Yagyu
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Abstract
Provided is an ultraviolet irradiation device including an excimer lamp, a main emission wavelength of which belongs to a wavelength band of 190-230 nm (first wavelength band), the ultraviolet irradiation device that shows high startability. This ultraviolet irradiation device includes: a lamp house on at least one surface of which a light extraction surface is formed; an excimer lamp accommodated in the lamp house, the excimer lamp that emits ultraviolet light, a main emission wavelength of which belongs to a first wavelength band of 190-230 nm; and a start assist light source arranged in a position in which ultraviolet light, a main emission wavelength of which belongs to a second wavelength band of 250-300 nm, is capable of being irradiated to the excimer lamp.
Claims12
An ultraviolet irradiation device comprising:
- a lamp house on at least one surface of which a light extraction surface is formed;
- an excimer lamp accommodated in the lamp house, the excimer lamp that emits ultraviolet light, a main emission wavelength of which belongs to a first wavelength band of 190-230 nm;
- a start assist light source arranged in a position in which ultraviolet light, a main emission wavelength of which belongs to a second wavelength band of 250-300 nm, is capable of being irradiated to the excimer lamp;
- and
- a first optical filter that substantially transmits the ultraviolet light in the first wavelength band and substantially reflects the ultraviolet light in the second wavelength band, the first optical filter being arranged in the lamp house at a place that the ultraviolet light radiated from the excimer lamp passes through.
Dependencies are inferred from the claim text.