Surface processing equipment and surface processing method

A surface processing method using an energy beam, comprising:

• providing a surface processing equipment including a multi-axis platform, a surface profile measuring device, an energy beam generator, a computing device, a first gas source and a second gas source, the energy beam generator being configured to provide the energy beam, the first gas source connected to a first inlet of the energy beam generator and configured to provide a first gas, and the second gas source connected to a second inlet of the energy beam generator and configured to provide a second gas, wherein the energy beam generator comprises a gas flow tube, a housing and a micro gas mixing element, the housing is configured to surround the gas flow tube, an internal space of the gas flow tube is a first flow path, the first gas is transmitted along the first flow path, the gas flow tube and the housing form a second flow path, and the second gas is transmitted along the second flow path, the micro gas mixing element has a plurality of thread grooves communicating through the gas flow tube;
• disposing a workpiece on the multi-axis platform;
• measuring the workpiece to obtain a surface profile;
• adjusting the energy beam generator according to an error profile;
• emitting the first gas from the energy beam generator to form the energy beam to perform a processing on the workpiece;
• emitting the second gas from the energy beam generator to from a shielding zone to surround the energy beam to isolate the energy beam from an external gas.