Ion source having different modes of operation
AssigneeApplied Materials, Inc.
InventorsGraham Wright, Shardul S. Patel
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Abstract
An ion source that is capable of different modes of operation is disclosed. A vaporizer is in communication with the ion source. The ion source may have several gas inlets, in communication with different gasses. When operating in a first mode, the ion source may supply a first gas, such as an inert gas, while heating the vaporizer. When operating in a second mode, the ion source may supply a second gas, which may be an organoaluminium gas. When operating in a third mode, the ion source may supply the second gas, while heating the vaporizer. Ions having single charges may be created in the first and second modes, while ions having multiple charges may be created in the third mode.
Claims19
An indirectly heated cathode ion source, comprising:
- an arc chamber, comprising a plurality of walls;
- an indirectly heated cathode disposed in the arc chamber;
- a vaporizer in communication with the arc chamber;
- a heater to heat dopant material disposed within the vaporizer;
- a first valve in communication with the arc chamber and a first gas source;
- a second valve in communication with the arc chamber and a second gas source;
- and
- a controller in communication with the first valve, the second valve and the heater so as to operate the indirectly heated cathode ion source in one of a plurality of modes.
A method of operating an indirectly heated cathode ion source in a plurality of modes, wherein the indirectly heated cathode ion source comprises a controller, an arc chamber, a vaporizer in communication with the arc chamber, and a heater to heat dopant material in the vaporizer, the method comprising:
- selecting a desired mode of operation;
- and
- using the controller to configure the indirectly heated cathode ion source to operate in the desired mode,
- wherein to operate in a multicharge mode, wherein the multicharge mode is used to create ions of a species having two or more charges, the heater is actuated so that vaporized dopant material comprising a metal enters the arc chamber and the controller enables a flow of a gas containing the metal into the arc chamber;
- wherein in a first single charge mode, wherein the first single charge mode is used to create ions of the species having a single charge, the controller enables the heater and enables the flow of an inert gas into the arc chamber;
- and
- wherein to operate in a second single charge mode, wherein the second single charge mode is used to create ions of the species having a single charge, the controller disables the heater and uses the gas containing the metal to generate a plasma.
An indirectly heated cathode ion source, comprising:
- an arc chamber, comprising a plurality of walls;
- a vaporizer in communication with the arc chamber;
- an indirectly heated cathode disposed in the arc chamber, wherein the indirectly heated cathode is used to generate a plasma in the arc chamber;
- and
- a controller configured to operate the indirectly heated cathode ion source in one of a plurality of modes, wherein in multicharge mode, the controller configures the indirectly heated cathode ion source such that two sources of a metal are used in a generation of a plasma.
Dependencies are inferred from the claim text.